5-Port Solenoid Valve

n = 4 to 24 n = 1 to 3 n = 4 to 24 n = 1 to 3 42.3 62.5 n: Number of stations 3 5 4 3 2 1 1 3 1 2 3 4 5 n: Number of stations Pitch 10.5 Pitch P = 16 (SY5000) P = 19 (SY7000) Make sure to mount in the right direction. Make sure to mount in the right direction. (20) SY5000: SY50M-86(N) SY7000: SY70M-86(N) Name plate is the number of stations (1 to 24).

Air Cylinder Series MB

Bore size (mm) 32 40, 50, 63 80, 100 Thread size M2.5 x 0.45 x 25 l M3 x 0.5 x 30 l M5 x 0.8 x 40 l Stroke (mm) 2 3 3 Pulling force 4.9 N 10 N 24.5 N e Release lock when mounting or adjusting the cylinder. Remove bolt under normal operations. It may cause malfunction of locking and release.

Metal Seal/Rubber Seal Series VQ Body Ported

L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Air Slide Table

force [N] Pressing force [N] ST 40, 50 ST 125,150 ST 100 310 0.5/0.67 50 0.5/0.67 190 0.3/0.4 30 0.3/0.4 0 100 200 300 400 0 100 300 200 400 500 Allowable overhang L [mm] Allowable overhang L [mm] MXQ12B-Z OUT side IN side ST 10 to 30 160 0.7/ ST 40, 50 Supply pressure [MPa] ST 75 Pressing force [N] ST 100, 125 110 0.5/0.67 70 0.3/0.4 0 100 200 300 400 Allowable overhang L [mm] Pressing

SY

(Station n) .

ISO Cylinder

Action Head cover type N E F Y Rubber bumper V V V V Mounting bracket*1 Applicable mounting bracket Action Head cover type Mounting bracket L M G U N Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Cylinder stroke [mm] Refer to the next page for standard strokes.

Base Mounted Metal Seal/Rubber Seal Series VQ

flow rate N (l/min) Air consumption N (l/min) Air consumption Vacuum pressure (mmHg) Suction flow rate Suction flow rate N (l/min) Supply pressure (MPa) 2-4-171 Base Mounted Series VQ2000 Manifold Option Parts for VQ2000 JIS Symbol Blanking plate assembly VVQ2000-10A-1 It is used by attaching on the manifold block for being prepared for removing a valve for maintenance reasons or planning

Electric Actuators

x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

ZP

Operating Flow Rate 100 90 Suction flow rate of vacuum generator (Q1) Quantity of vacuum saving valves (N) = 80 Minimum operating flow rate (Q2) Vacuum pressure (kPa) 70 Example) Vacuum saving valve used: ZP2V-A8-05 From Table 1, Q2 can be calculated as 5.0 L/min (ANR). 60 Q2 = 5.0 L/min (ANR) 50 N = 6 (unit) 31 {L/min (ANR)} 5 {L/min (ANR)} 40 30 N = 6 (unit) Table 1.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

2 pcs. 1 pc. n pcs.

ZP

Operating Flow Rate 100 90 Suction flow rate of vacuum generator (Q1) Quantity of vacuum saving valves (N) = 80 Minimum operating flow rate (Q2) Vacuum pressure (kPa) 70 Example) Vacuum saving valve used: ZP2V-A8-05 From Table 1, Q2 can be calculated as 5.0 L/min (ANR). 60 Q2 = 5.0 L/min (ANR) 50 N = 6 (unit) 31 {L/min (ANR)} 5 {L/min (ANR)} 40 30 N = 6 (unit) Table 1.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(Station 1) Light/Surge voltage suppressor Individual SUP spacer Interface regulator Interface regulator Max.21 (DIN rail dimension) Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A n: Stations L Dimension L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5 175 154.5 15.5 16 373 362.5 346.5 13.5 15 360.5 350 330.5 15 14

Air Cylinder

CBG1 100 H L 25 N CJ2 CDBG1 100 M9BW N 25 H N L C JCM CM2 (Built-in magnet) With auto switch Number of auto switches Manual release CM3 Mounting Type N Non-locking type L Locking type N Rubber bumper A Air cushion B Basic L Axial foot F Rod flange G Head flange U* Rod trunnion T* Head trunnion D Clevis Nil 2 pcs.

Magnetically Coupled Rodless Cylinder

Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t N m 4.4 1.37 2.65 13.2 Tightening torque Square nut l t Service Life and Replacement Period of Shock Absorber Caution 1.

Battery-less

Absolute (Step Motor 24 VDC) LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 Model Lead Pushing speed [mm/s] Pushing force (Setting input value) LEYG16M L mE A/B/C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80

Table of Contents

Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 93 93 93 93 Vacuum pressure Air consumption 80 80 80 80 Suction flow rate N (l/min(ANR)) Suction flow rate N (l/min(ANR)) Suction flow rate Air consumption N (l/min(ANR)) Air consumption N (l/min(ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure kPa 67 67 20 67 10

0.4

P = 10.5 n: Stations Note) ( ): VVQ1000-NC-n Dimensions Blanking plug (For one-touch fittings) KQ2PA L D Model Applicable fitting size A L D Model Applicable fitting size d d It is inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.

SX

a n k i n g plate assembly.

LEC-OM02704CN

) PD20 (LSP)(LSN)OFF PD20 PD20 (LSP)(LSN) 0 1 2 3 (LSP) (LSN) 0() 1() 2() 3() PD20 0 S S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m