Series AP500 ) 0 50 100 150 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4
Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set pressure
(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.
OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).
) 2 (Different surfaces, same surface), 1 15 D-M9 D-M9W D-M9AL 15 + 55 (n2) 2 (n=2, 4, 6, 8) 25 + 55 (n2) 2 (n=2, 4, 6, 8) n (Same surface) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n 1 10 25 2 (Different surfaces, same surface), 1 2 (Different surfaces, same surface), 1 15 10 D-M9V D-M9WV D-M9AVL 10 + 30 (n2) 2 (n=2, 4, 6, 8) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n n 2 (Different surfaces) 2 (Same surface)
) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
HEP Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 Related 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 Equipment 8.4 10.6 9.3 Applicable tubing O.D.: 3.2 Applicable tubing O.D.: 4 10 15.5 16.5 Vacuum (V) port Vacuum (V) port Q2 N2 ZA1 1 1 Q2 N2 ZA1 1 2 Q2 N2 ZA1 1 4 Q2 N2 ZA1 1 5 Dimensions of the vacuum (V) port fittings after installation 9.3 13.7
= 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.
4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)
= Input block stations (Station n2) Light/Surge voltage suppressor L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 60 45.5 10 11.8 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations (n2) 0 1 2 3 4 5 6 7 8 185.5 210.5 223 248
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
Control of metal wire tension Accumulated indication shows the operating flow rate or residual amount (of N2 etc.) in a gas cylinder. Flow control of N2 gas to prevent lead frame oxidation. N2 blow prevents distortion of camera image due to air turbulence.
EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.
/J79W/F7WV D-F7BA/F7BAV D-F7NT D-M9WV D-M9AV D-F7WV D-F7BAV D-A79W 10 15 10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)
) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123
unit: IP40] IP40 IP40 IP40 IP65 Dry air, N2, Ar, CO2 Fluid Air, N2 Air, N2 Dry air, N2 Dry air, N2 Dry air, N2 Setting Digital Digital Digital Digital Digital Digital Rated flow range 1 to 10 L/min 5 to 50 L/min 10 to 100 L/min 20 to 200 L/min 50 to 500 L/min 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 30 to 3000 L/min 60 to 6000 L/min 120 to 12000 L/min 0 to 0.5 L/min 0
1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type (Thermistor) Air N2 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 2 Flow Switch Variations/Basic Performance Table New New PFMV PFM PF2A PFMB PFMC Power supply voltage Rated flow range Setting Repeatability Hysteresis Output Display Fluid Enclosure Series IP40 IP65 IP65 IP40 IP40 Dry air, N2 Air, N2 Air
Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123