Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Dual Speed Controller with One-touch Fitting Series ASD

min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area

LEC-OM02904

1 ( 2 ) 2 V V L 2 M W W L 3 CHARGE TR ( 3 ) B1 RA L 11 B DC24V L 21 B2 CN2 LEC-MR-J3BAT MR-J3BAT USB D/A CN4 I/F ( ) CN1A CN1 B CN5 CN 3 ( 2 ) I/O USB 1.LECSS-S5 2.

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

> 4.1 [46] [54.5] 22.5 1 32 P P 5.5 B B A B A B A B A B 4.7 35 23.5 44.4 <45.1> 10.2 26 3 R R A A G: Approx. 300 H: Approx. 600 lead wire ( length ) (Pitch) P = 10.5 13.5 24.3 33.2 (M5 port) 2n2-One-touch fitting (ports A, B) Applicable tube O.D.: 4 6 2n1-M5 x 0.8 (ports A, B) L2 [rail mounting hole pitch 12.5] (5) L1 DIN rail holding screw DIN rail (VZ1000-11-1-) L type plug connector M

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

wire length) L1 L2 4.5 (Station n) (Station 1) (Light/surge voltage suppressor) (Station n) (Station 1) 54.1 [61.1] + + + + 38.7 25.5 A A 19.2 9.4 21 (Pitch) P=17 21 1/8 (A port) 19.2 9.4 A A 18.5 (Pitch) P=16 21 M5 x 0.8 (A port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 49 49 49 49 P R P R P R P R 57.2 [59.4] 67 [69.2] 52.2 58.7 66.1 76.1 Max. 10 77 Pg7

Plug-in/Plug Lead: Single Unit

B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1 B A 58.5 X 12 Stations 2-Rc 1/8 (External pilot port) 15.5 22 51 69 117 42 16 107.8 179 D side With connector on D side (FD) Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) Dimensions L n 12 568 588 L1 L2 11 527 547 10 486 506 9 445 465 8 404 424 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 1

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

plug connector AC, Latching) L2 L1 27 32 38.5 Lead wire length 300 mm (M plug connector) (L plug connector) P = 10.5 Manual override 2-C6 3(R) EXH port 4 37 VQC (L plug connector AC, Latching) Indicator light 82.5 (M plug connector) 32 DIN rail clamp screw 88.5 (L plug connector) SQ (L plug connector) 4 80 3 VQ0 49.3 23.2 20.2 7.5 35.5 35 5.5 83.5 (M plug connector) 89.5 (L plug connector

3 Port Solenoid Valve

M3 x 0.5 recommended 30 33 L2 L1 Station n 1 2 3 4 5 6 7 8 9 10 11 12 52.4 36 62.6 46.2 72.8 56.4 83 66.6 93.2 76.8 103.4 87 113.6 97.2 123.8 107.4 134 117.6 144.2 127.8 154.4 138 164.6 148.2 L1 L2 18 a Series VV100 3 Port Solenoid Valve Individual Wiring Manifold Non Plug-in Manifold Options D-sub connector cable assembly For 15 pins V100-DS15(N) For 26 pins V100-DS26(N) L L Terminal no

Speed Controller with Indicator

rate [L/min (ANR)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 02 01, 23 300 50 03, 04 100 200 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Electric Actuator

5: LEYG16 B M L Lead 5: LEYG16 AB M L Lead 10: LEYG16 AA M L 4.4 4.4 Lead 10: LEYG16 A M L 0 0 600 0 100 200 300 400 500 600 0 100 200 300 400 500 Speed [mm/s] Speed [mm/s] LEYG25 l M LEYG25 Al M L L 33 66 Lead 3: LEYG25 C M L Lead 3: LEYG25 AC M L Vertical work load [lb] Vertical work load [lb] 22 44 Lead 6: LEYG25 B M L Lead 6: LEYG25 AB M L 11 22 Lead 12: LEYG25 A M L Lead 12: LEYG25 AA

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 10, 11, 12 Effective

VQ7-6/7-8

/2, 3/4 35 L: Dimensions Formula L n 10 9 8 7 6 5 4 3 1 2 Port P, R1, R2 n: stations L1 = 56n + 64 L2 = 56n + 80 n: stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 120 232 176 Rc1/2 L2 640 584 528 472 416 360 304 136 248 192 L1 650 594 538 482 426 370 314 146 258 202 Rc3/4 L2 666 610 554 498 442 386 330 274 162 218 Dimensions inside ( ) are for Rc3/4 Dimensions inside

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(L): VQZ2 5(R)L Indicator light 83 300 (Lead wire length) Cover diameter 1.5 Pg.7 Cross sectional area 0.23mm2 53 87 MAX.10 Applicable cord O.D.

3 Port Solenoid Valve Metal Seal Series VZ200 1

300 7 4 2-4.3 mounting hole With light surge voltage suppressor (Lead wire length) 17.3 31.4 VKF 2-M5x0.8 4-Rc 1/8 26 VQZ R side 49.5 VZ VS Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 33 2 43 65 3 59 81 4 75 97 5 91 113 6 107 129 7 123 145 8 139 161 9 155 177 10 171 193 Symbol L1 L2 VFN Common exhaust: VV3Z2-S50 (Built-in One-touch fittings manifold) (G) (L) (M) (D) With light/

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Manual override (Pitch) P = 10.5 9 (Pitch) P = 10.5 12.5 L2 3.5 L1 (Station n) (Station 1) (Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) 43.5 [50.5] + + + + + + + 28.1 A A B B 15 15 12 12 B B A A 1 1 3 3 (Pitch) P = 10.5 13.5 (Pitch) P = 10.5 M3 x 0.5 (A, B port) M3 x 0.5 (A, B port) 14.5 L plug connector (L) M plug connector (M) M8 connector (W0

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Manual override (Pitch) P = 10.5 9 (Pitch) P = 10.5 12.5 L2 3.5 L1 (Station n) (Station 1) (Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 43.5 [50.5] + + + + + + + 28.1 A A B B 15 15 12 12 B B A A 1 1 3 3 (Pitch) P = 10.5 13.5 (Pitch) P = 10.5 M3 x 0.5 (A, B port) M3 x 0.5 (A, B port) 14.5 L plug connector (L) M plug connector (M) M8 connector (WO

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

M5T, N3T [ ] for AC L type plug connector (L) M type plug connector (M) 91.7(GZ:93.1) [95.1] 78.8(GZ:80.2) [82.2] 1 15.5 1.5 36.5 13.5 79.4 [82] 1 R 57.4(GZ:58.1) [59.1] 56.4(GZ:57.1)[58.1] A A A A A R 35.5 B B B B B P P 53.7 [55] 63.3 92.3 [94.9] 98.6 111.6 24.5 (Mounting holes) (Pitch) P=10.5 11.5 L2 4 N3T(Built-in one-touch fitting) L1 L1 L2 11 4.5 (Lead wire length) G:About 300 H:About

44

9 12 10 14 15.8 18.7 5.8 6.6 d L 15 17 22.2 7.6 M L M L 16 17 24.3 8.5 21 22 28 9.3 324 KFG2 Series Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection Thread: R, Rc Dimensions Bulkhead Union: KFG2E Applicable tubing size (mm) O.D.