Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Saving Vacuum Pump System Series ZQ Manifold Exploded View e r w a) part t a) part q Table (1) Part no.

Electric Actuator

[mm] Stroke range (mm) C D EH EV H J K L M O1 R S T U Size 15 to 100 25 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 105 to 400 20 to 100 32 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 105 to 500 Without lock With lock Without lock Incremental encoder Absolute encoder With lock Stroke range (mm) B V Size A W 274.9 Z A W 233.4 Z A W 274.5 Z A W Z 238 15 to 100

Air Cylinder

6 o r t qy w e!7 iu !8 CJ1 CJP CJ2 JCM CM2 CM3 With air cushion CG1 CG1 q r !2 !1 !8 !4 w !0 e i !5 !9 !3 o !6 t !7 CG3 JMB MB MB1 CA2 CS1 CS2 Component Parts No. Description Material Note 1 Rod cover Aluminum alloy Hard anodized No.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

Vacuum Module Series ZX

Port size M3 M5 M3 x 0.5 M5 x 0.8 Pilot port/External release port Pilot valve DC: 1 W (With indicator light: 1.05 W) Nil Note) In the case of ZX1VJ114, M, MN and MO cannot be used. AC DC: 0.45 W (With indicator light: 0.5 W) Y Caution 24 VDC and 12 VDC are applicable to 0.45 W. Note) Screw length of VJ100 and VJ300 for series ZX is different from that of the standard model.

REA/REB

9 u o i @7 @9 @5 @6 @4 e y r !3 q #0 !1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

REA/REB

depth R 14 8-Q Effective thread depth R 14 22 23 25 K W 23 25 4-M8 x 1.25 Effective thread depth 12 B C 0.1 14.5 2 S + Stroke 2 ZZ + Stroke (mm) Model B C D E (h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 300.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 0 320.039 100 38 66 72.2 26 122 69 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting Nuts: 2 pcs.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Dual Speed Controller with One-touch Fitting Series ASD

6 w !7 !1 !0 !6 w !7 !1 !0 !5 w !7 !0 o !2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

M5: M5 thread 4 2-C6 3(R) EXH port 80 (L plug connector) 86 (M plug connector) 92 (L plug connector) FG R2 R1 SG S2 S1 0V 24V SMC ERR RUN TRD R R 49.3 23.2 5.5 35 ADDRESS 8 4632 D F 6 20.2 SA MODEL 4 2 12.2 P P 3 2-C6 1(P) SUP port DIN rail clamp screw L3 L4 57 (M plug connector) Indicator light 51 (L plug connector) Applicable connector: Flat ribbon cable connector (26P) (Conforming to

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L1 = 6 Applicable shaft type: W Q1 = M L1 + (3 x P) (mm) (mm) L2 = Q1 L2 + (3 x P) Size L1 = Q2 Size 50 50 M3, M4, M5 M3, M4, M5 63 63 M4, M5, M6 M4, M5, M6 80 80 M4, M5, M6 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8 Symbol: A15 Applicable to single vane type only Symbol: A14 Applicable to single vane type only A special end is machined onto the long shaft, and a through-hole

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Battery-less

5 r t w q y !6 !

SZ3000

3 B 2 R 3 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P= 10.5 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 2n1-M5 x 0.8 (A, B ports) (L4) L3 (3.2) 101.2 U Side D Side 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 DIN rail Manual override ( In case of locking

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Fieldbus System

S Z NS NZ r Pilot type Nil R Internal pilot External pilot Only Nil is available for M5. !