High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

CQS

size (mm) E C OA D OB Q RA RB T H I K M N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

10 14 5-M5 0.8 (Piping port) 28 [ ] for AC 3 4 5 3 4 5 L type plug connector (L) : SYJ3 40L -M5 M type plug connector (M) : SYJ3 40M -M5 33.5 16.5 33.5 16.5 23.2 (Mounting holes) 23.2 (Mounting holes) 22 3 22 3 2.5 2.5 A B A B 11 11 17.5 17.5 A B A B 47.4 50.7 33.7 About 300 111.6 39.2 [40.5] (Lead wire length) 92.3 [94.9] (Lead wire length) 52.6 [59.1] About 300 41.5 [48] 41.5 [48] 33.5

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

24

[mm] MGPM, MGPL Common Dimensions Bore size [mm] Standard stroke [mm] B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P Nil TN TF 16 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 7 6 30 10.5 7.5 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 20 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 78 62 10 8 8 36 11.5 9 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

M5 Note 4) (68.4) 57.3 PE Vacuum (V) port (M5) Note 4) 20.3 29.4 P V 9.7 Exhaust part 17.7 22.8 0.8 87.2 Note 1) 10 Circuit diagram 5 6 E F Note 1) The above dimensions are for ZQ1 1U-K2 L-F .

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

42

: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14

SYJ300/500/700

. 600 (Lead wire length) 48.6 [50.8] VT VP (Light/Surge voltage suppressor) VG 41.5 [48.5] + M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx.

Electric Actuator

Max. tightening torque (lbfft) M4 x 0.7 M5 x 0.8 M5 x 0.8 Length: L (mm) 1.1 2.2 2.2 Model Bolt LEYG16M L LEYG25M L LEYG32M L 32 40.5 50.5 L Body fixed/Bottom mounting Max. tightening torque (lbfft) M5 x 0.8 M6 x 1.0 M6 x 1.0 Max. screw-in depth (mm) 2.2 3.8 3.8 Model Bolt Workpiece fixed/Rod end female thread LEYG16M L LEYG25M L LEYG32M L 10 12 12 Max. tightening torque (lbfft

REA/REB

Model REAH25 REAHT25 REATH32 REAH15 REAH20 REAH10 Screw size M5 x 0.8 l-8 M8 x 1.25 M6 x 1.0 l-9 M4 x 0.7 l-7 Bolt dimensions l-12 Dimension t Max.

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 12 LXP M6 x 1 7.4 10 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

Air Cylinder Series CM2

-H -R -W N L Stroke Axial foot style: CBM2L Bore size LH B 4 x LD 2 x LC LT X Y Y X LS + Stroke Z ZZ + Stroke LZ LX -H -R -W N L Stroke N L Stroke Head side flange style: Rod side flange style: CBM2F Bore size -H -R -W CBM2G Bore size 4 x FD Mounting hole C2 2 x FD Mounting hole FY B FX FZ Z + Stroke FT FT Z 20 to 32 40 -H -R -W N L Stroke Single clevis style: CBM2C Bore size CD U L RR CX

0.

Port size [2(A) port] C3 C4 C6 M5 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting M5 thread (Replaceable type) Body type Manual override Nil B Non-locking push type Locking type (Tool required) Function Note) For inch size one-touch fittings, refer to page 15.

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

Air Cylinder

Axial foot: CBM2L Bore size Stroke 4 x LD 2 x LC LH B CJ1 X Y Z Y X LT CJP ZZ + Stroke LS + Stroke LZ LX Rod flange: CBM2F Bore size Stroke * -H -R -W CJ2 N L Head flange: CBM2G Bore size Stroke -H -R -W N L JCM 4 x FD Mounting hole 2 x FD C2 CM2 CM2 Mounting hole FY CM3 B FX FZ FT Z + Stroke CG1 FT Z 20 to 32 40 CG3 Single clevis: CBM2C Bore size Stroke -H -R -W N L CD JMB MB MB1 U L

Rotary Actuator/Vane Style Series CRB2

Single vane type/Double vane type With angle adjuster CRB2BWU40-S/D (mm) h 6 x M5 x 0.8 depth 10 Keyway dimensions b l l b (h9) h (h9) Model CRB2BWU404 0 0.030 4 20 0 0.030 56 63 A port B port 25h9 0 0.052 10g6 0.005 0.014 11.5 4 0 0.030 2 20 2 x M5 x 0.8 45 30 6.5 Rotary actuator 35 A port B port 36.3 5.1 Angle adjuster Cap B W R 4 0 C SMC R R O O T A T A R U Y T C A 66 Series CRB2BWU Rotary

Compact Rotary Actuator Series CRQ2

Rotation starting point End of rotation R e 10 g ot 10 n at ra L io n B Rotation starting point End of rotation n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 A A R e o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Size 10 15 20 30 40 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 The figure shows the view from

SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.