Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

2

9.6 8.7 2 x Applicable tubing D D M M L Note) D is maximum diameter.

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30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

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30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

A

O A D D A T A P E R M I S S I B L E L A T E R A L L O A D W (N) 1N = 0.102kgf H O W T O O R D E R C O M P A C T G U I D E C Y L I N D E R Stroke (mm) Bore Size Model 10 20 25 30 40 50 75 100 125 150 175 200 12 MGPM 24 19 17 14 13 26 22 MGP 12 MGPL 37 27 22 35 30 23 18 16 MGPM 38 31 27 23 21 37 32 T Y P E O F B E A R I N G P O R T I N G 16 MGPL 54 40 32 54 47 35 28 M Slide Bearing L Ballbush

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L RSH RS1H 30 50 Z73 D L Bore size Number of auto switches 50mm 63mm 80mm 50 63 80 Thread type Nil S 2 pcs. 1 pc.

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MDHR2-10/15 MDHR2-20/30 D20H H L L Auto switch of D-M9 is used. When auto switch D-M9V is used. Auto switch of D-M9V is used. (mm) Max. Protrusion of Auto Switch from Edge of Body: H Max.

CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D Mounting bolt part no. Cylinder model C D Mounting bolt part no. CQSXB12-5D CQSXB20-30D CQ-M5 x 50 L CQ-M3 x 25 L 50 25 CQSXB00-10D CQSXB00-35D x 55 L x 30 L 55 30 CQSXB00-15D CQSXB00-40D x 60 L x 35 L 60 35 6.5 6.5 Example) CQ-M3x25 L 4 pcs.

Electric Actuators

C 30 D Refer to page 300 for mounting.

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Hydraulic

Made to Order Modification of Rod End Configuration 1 CH2 Series Mounting type Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end configuration pattern symbol A1 A2 A3 CO.5 30 30 30 30 D D D d d Width across flats F F F A4 A5 A6 30 30 30 D D D d D d 30 30 Width across flats Width across flats F Width across flats F F Note) Female thread effective depth should

Table of Contents

C 30 D Refer to page 300 for mounting.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A7H/A80H D-A73C/A80C D-F/F7V/F79F D-F7W/F7WV D-J79/J79W D-J79C D-F7BAL/F7BAVL D-Z7/Z80 D-Y59/Y69 D-F7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-A7H, D-A80H D-F7, D-J79, D-F7W D-J79W, D-F7BAL D-F79F, D-F7NTL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-Y7BAL D-A7 D-A80 D-A79W D-F7NTL D-A7 D-A80 D-A73C D-A80C Bore size (mm) A 32.5 32.5 36.5 A 33 33 37 A 30 30 34 A 38 38 42 A 29 29 33 38.5 42 U 80 88 98

5

Bore size (mm) Dd9 L l m d Part no.

Made to Order

-XC13 (mm) D-F7BA/F7ABV D-A72/A7H/A80H D-A73C/A80C D-M9/D-M9V D-M9W/D-M9WV D-M9A/D-M9AV D-F7/F79F/F7V D-J79/J79C D-F7W/J79W/F7WV D-F7NT D-A7 D-A80 D-A79W Auto switch model A B A B A B A B A B 20 31.5 22.5 (30.5) 30.5 21.5 (29.5) 35.5 26.5 (34.5) 30 21 (29) 27.5 18.5 (26.5) 25 31 23 (31) 30 22 (30) 35 27 (35) 29.5 21.5 (29.5) 27 19 (27) 32 32.5 23.5 (31.5) 31.5 22.5 (30.5) 36.5 27.5 (35.5)

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Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

Electric Actuator/Slider Type

Weight (g) Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 Dimensions (mm) D-M9 D-M9 V M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.7 2.8 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive position 62 2-Color Indication Solid State

V100

end plate assembly> L 52 30 10 U side end plate assembly part no.