Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 09 (One-touch Fitting ø5/16"), VAC: N03 (Screw-in NPT 3/8), EXH: 11 (One-touch Fitting ø3/8")

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 09 (One-touch Fitting ø5/16"), VAC: N03 (Screw-in NPT 3/8), EXH: 11 (One-touch Fitting ø3/8"), Accessories: NS (w/o Standard Bracket, w/Silencer)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 11 (One-touch Fitting ø3/8"), VAC: N03 (Screw-in NPT 3/8), EXH: 13 (One-touch Fitting ø1/2"), Accessories: N (w/o Bracket, w/o Silencer)

This is a legacy product, and replaced byAC31-N03-8Z-B-X2217A, F/R/L COMBO UNIT EPOXY COATED, AIRLINE EQUIPMENT, AC MASS PRO, EC, AC MASS PRO 3/8 MODULAR (NPT), .00000 lb

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa), SUP: 11 (One-touch Fitting ø3/8"), VAC: N03 (Screw-in NPT 3/8)

Model: L (Male Elbow, Union Elbow), Applicable Tube O.D.: 13 (1/2"), Port Size/Applicable Tube: N03 (3/8" Thread)

This is a legacy product, and replaced byAFD30-N03-LZ-D AFD MASS PRO. MICRO MIST SEPARATOR. AIRLINE EQUIPMENT. AFD MASS PRO 3/8 MODULAR (NPT). 0.5879 lb. EC.

This is a legacy product, and replaced byAF40-N03-7JZ-40-D AIR FILTER, MODULAR F.R.L.. FILTER. 0.36 lb.

This is a legacy product, and replaced byAFD30-N03-LZ-D AFD MASS PRO. MICRO MIST SEPARATOR MODULAR. AIRLINE EQUIPMENT. AFD MASS PRO 3/8 MODULAR (NPT). .54846 lb. EC.

1

5 CY CX D-A9l 10 7.5 15 27 39 0.5 16 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 CK1 D-A9lV 10 7.5 7.5 15 27 39 0.5 16 7 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 C(L)K Rail mounting D-F7l/F7lV D-J79/J79C D-A7lH/A80H D-A73C/A80C 10 10.5 10.5 18 30 42 3.5 C(L)KU 16 10 10 18.5 30.5 42.5 48.5 72.5 90.5 102.5 4 CKQ D-F7lW/J79W D-F7lWV/F79F D-F7BA/F7BAV 10 10.5 18 30 42 3.5 16 10 18.5 30.5 42.5 48.5

2

9.6 8.7 2 x Applicable tubing D D M M L Note) D is maximum diameter.

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

A

O A D D A T A P E R M I S S I B L E L A T E R A L L O A D W (N) 1N = 0.102kgf H O W T O O R D E R C O M P A C T G U I D E C Y L I N D E R Stroke (mm) Bore Size Model 10 20 25 30 40 50 75 100 125 150 175 200 12 MGPM 24 19 17 14 13 26 22 MGP 12 MGPL 37 27 22 35 30 23 18 16 MGPM 38 31 27 23 21 37 32 T Y P E O F B E A R I N G P O R T I N G 16 MGPL 54 40 32 54 47 35 28 M Slide Bearing L Ballbush

Table of Contents

L RSH RS1H 30 50 Z73 D L Bore size Number of auto switches 50mm 63mm 80mm 50 63 80 Thread type Nil S 2 pcs. 1 pc.

Table of Contents

MDHR2-10/15 MDHR2-20/30 D20H H L L Auto switch of D-M9 is used. When auto switch D-M9V is used. Auto switch of D-M9V is used. (mm) Max. Protrusion of Auto Switch from Edge of Body: H Max.

CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D Mounting bolt part no. Cylinder model C D Mounting bolt part no. CQSXB12-5D CQSXB20-30D CQ-M5 x 50 L CQ-M3 x 25 L 50 25 CQSXB00-10D CQSXB00-35D x 55 L x 30 L 55 30 CQSXB00-15D CQSXB00-40D x 60 L x 35 L 60 35 6.5 6.5 Example) CQ-M3x25 L 4 pcs.

Electric Actuators

C 30 D Refer to page 300 for mounting.

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.