Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

60

20 30 40 50 for the appearance.

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Compact Manifold Regulator

250 300 0.00 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative Values) ARM10F-06 ARM10-06 ARM10F-06-1 ARM10-06-1 Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Conditions: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) 0.25 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.25

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

JXCx-OMT0062

*1) Procedures for resuming operation when alarm group D is generated 1.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Inch Size Applicable tubing O.D. d Applicable tubing O.D. d T D1 D2 D3 L1 L2 L3 M1 L4 (3) A (2) D1 D2 L1 L2 L3 L4 (3) A (2) Weight (g) H (1) Weight (g) H (1) T M1 Model Model Min.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Note 5) 3/16", 3/8", 1/2"are made of brass AS131F (3.2, 4, 6, 1/8", 5/32, 1/4), AS231F-01(3.2, 4, 6, 1/8", 5/32) are POM. 15-9-5 5 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Applicable tubing O.D. d 1/8" Applicable tubing O.D. d A(2) Weight (g) T D1 H(1)

VZS

VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9

5

Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9W/M9WV D-M9A/M9AV D-M9/M9V D-A9/A9V BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 REA D-A3/A44 D-G39/K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 REB D-A5/A6/A59W D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT REC BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Smooth Smooth D-P3DWA BA10-032S BA10-040S BA10-050S BA10-050S BA10-063S BA10

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Hs Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 30 72.5 73

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Hs Hs Ht Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 72.5 73 30

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

Stainless Steel 316 Fittings

16.6 18.5 M L Q A D D O N M M Note 1) D is maximum diameter.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Auto switch model Bore size [mm] 32 40 50 63 80 100 125 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV D-A9m/A9mV C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 D-F5m/F5mW D-J59/J59W D-F5BAL D-F59F/F5NTL D-A5m/A6m D-A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-Y59m/Y69m D-Y7P

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Auto switch model Bore size (mm) 32 125 40 50 63 80 100 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A3/A44 D-G39/K39 BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 BS1-125 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F D-F5BA D-F5NT BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 Mounting example for D-A9(V), M9(V), M9W(V), M9A(V) D-P4DW

Auto Switch Guide

10-20-34 D-J79C Connector 10-20-35 D-F59/F5P/J59/J51 Grommet Tie-rod Terminal conduit 10-20-36 D-G39C/K39C D-M9N/M9P/M9B 10-20-37 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B D-F9G/F9H 10-20-40 Direct Grommet D-Y59A/Y59B/Y7P 10-20-38 D-Y69A/Y69B /Y7PV 10-20-41 D-Y7G/7H 10-20-39 D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 10-20-42 Band Grommet D-G59W/G5PW/K59W 10-20-43 2-color indication D-F79W/F7PW/J79W 10-20-44