Cooling Capacity: 15 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: N+Z

Cooling Capacity: 15 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: DeviceNet Communication

Cooling Capacity: 15 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: DI Control Kit

Cooling Capacity: 15 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: D+N

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: DeviceNet Communication

Cooling Capacity: 15 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: C+D

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+D+N+W

Proposals for Energy Saving

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H Sensors Measuring Instruments ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( )

A_HEC-OM-K001

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.

Parallel Style Air Gripper Series MHZ

MHZ16-PS MHZ-A1602(N) MHZ20-PS MHZ-A2002(N) MHZ25-PS MHZ-A2502(N) MHZ32-PS MHZ-A3202 MHZ-A3202-1 MHZ-A3202-2 MHZ-A3202-3 -X MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly Mounting screw MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MRHQ MHZ2-D MHZ2-S MHZ2-C MHZ2-

Table of Contents

(Thread symbol N: 3/8 inch) (820) [200 VAC specification] Terminal block K L H M N J 4-13 P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36 154 21 330 473 1/2 13 453 283

CQ2

M N O Note) Dimensions of model with rubber bumper are same as standard as shown above.

CL

CJ-T016B Bore size 16 TH TK TN TT TU TC TDH10 14 TV TW TX TY 16 +0.048 0 5 35 20 6.4 2.3 5.5 48 28 38 3.1-14 Fine Lock Cylinder/Double Acting Single Rod Series CLM2 20, 25, 32, 40 How to Order CL J H L E 25 100 CLM2 Standard MLGC CNA E J C73 H L 25 100 CDLM2 With auto switch CB Number of auto switches CV/MVG Air cylinder with auto switch 2 1 n S n Style CXW H Pneumatic Air-hydro CXS Auto

Compact Manifold Regulator Series ARM5

L2 L2-10.5 L1=(28 x n)+56 18 20 28 52.5 81 28 5.3 5.5 SMC SMC SMC SMC 28 56 SMC SMC K K P P C C U U O O S S L L H H 8 3 5 11.5 L2 dimension DIN rail part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

SI unit for 16 point Uni-wire H System (NKE.)

Basic type / Direct mount type Series CY3B/CY3R

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB T 4 x counter bore dia.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 U 114 136 165 190 N 15 17 20 25 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 H 39 45 55 60 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 H 30 33 43 44 N 15 17 20 25 U 105 124 153 174 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

smcmaintenancepartslist

Contents Bore size (mm) Set of left nos. @7, @8, @9, #0 Set of left nos. @7, @8, @9, #0, #1 @6 @7 @8 @9 #0 #1 Wear ring A Special resin 6, 10: Not available 6 CY1S6-PS-N Wear ring B Special resin 10 CY1S10-PS-N Cylinder tube gasket NBR Guide shaft gasket NBR 15 20 25 32 40 CY1S15-PS-N CY1S20-PS-N CY1S25-PS-N CY1S32-PS-N CY1S40-PS-N Piston seal NBR Set of left nos. @6, @7, @8, @9, #0, #1 Scraper

Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 N 15 17 20 25 U 114 136 165 190 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 N 15 17 20 25 U 105 124 153 174 H 39 45 55 60 H 30 33 43 44 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63