(mm) D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) A B W A B W A B W 6 10 16 20 25 32 13.5 5.5 3.5 (1) 17.5 9.5 0.5 17.5 9.5 1.5 12.5 9.5 7.5 (5) 16.5 13.5 3.5 16.5 13.5 5.5 16 11.5 9.5 (7) 20 15.5 5.5 20 15.5 7.5 20 15 24 19 9 24 19 11 13 (10.5) 22.5 16 26.5 20 10.5 26.5 20 12.5 14.5 (12) 23.5 18.5 27.5 22.5 12.5 27.5 22.5 14.5 16.5 (14) Note 1) Figures in the table above are used
Motor Mounting 143 Deflection Data 145 Part Number Designations N 1 1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.
W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000
) C8 (8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size A, B port Manifold base weight W (g), n: Stations 2 to 10 stations: W = 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Note 1) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port
A 20 11LEFS 10 15 Lead A 10 11LEJS 5 Lead H Lead H 5 25A0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEC LEFS32/Ball Screw Drive LEC S Horizontal Vertical LEC SS-T 30 50 Lead B LEC Y 40 Work load: W [kg] Work load: W [kg] Lead B 20 Motorless Lead A 30 Lead A LAT 20 10 Lead H Lead H LZ 10 0 0 LC3F2 0 100 200 300 400 500 600 0 200 400 600 800 1000
Contents Series Bore size (mm) Kit no. 20 25 32 40 50 63 80 100 CBG1A20-PS-W CBG1A25-PS-W CBG1A32-PS-W CBG1A40-PS-W CBG1A50-PS-W CBG1A63-PS-W CBG1A80-PS-W CBG1A100-PS-W Order seal kit in accordance with the bore size.
200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5 S7 S81 Power supply voltage Absolute 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz 1 Not applicable for Series LEY Dimensions LECSAm 40 135 2 x 6 Mounting hole
Basic Foot Front flange W/o rod boot W/ rod boot S W/o rod boot W/ rod boot W/o rod boot W/ rod boot S Stroke range WB S Bore (mm) Bore (mm) Bore (mm) Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 LS Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 GB GB TB GB ZZ 210 ZZ ZZ 206 223 226 250 ZZ ZZ 206 223 226 250 ZZ 20 25 32 40 20 25 32 40 20 25 32 40 186 201 204 230 201 to
(For details, refer to page 4-4-25.) 4-4-20 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.
Z R U 5 6 V S R 1 2 Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor Power saving circuit is not available in the case of W type.
1 q r e w t i y u o !0 !
(Max. 20 stations) Note) Indicate "Nil" for types T, T1, and S.
Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8
10 15 T99 L CDRB2 W F 180 S With auto switch Size: 10, 15 CDRB2 W B 180 S T79 L With auto switch Size: 20, 30, 40 Size Made to Order Refer to the table below for details.
If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.
S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting
to Order S 20 90 B B S 20 90 M9BW CRQ2 CDRQ2 X X Standard With auto switch Built-in magnet Low-speed specification Shaft type Number of auto switches S W Single shaft Double shaft Nil S n 2 pcs. 1 pc. n pcs.
D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 9.5 1.5 17.5 0.5 5.5 9.5 13.5 17.5 3.5(1) 13.5 5.5 16.5 3.5 9.5 13.5 12.5 16.5 7.5(5) 15.5 7.5 20 5.5 11.5 15.5 16 20 9.5(7) 19 11 24 9 15 19 20 24 13(10.5) 20 12.5 26.5 10.5 16 20 22.5 26.5 14.5(12) 22.5 14.5 27.5 12.5 18.5 22.5 23.5 27.5 16.5(14) Note 1) Figures in the table above are used as a reference
Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8
L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power