Compact Cylinder

A30 Symbol: A29 Symbol: A28 Symbol: A27 DA 30 H1 30 30 30 H1 W H1 E DA W X T T C1 F L X L F X X L H1 L 182 Series CQ2 Made to Order 1 Please contact SMC for detailed dimensions, specifications, and lead times.

HRX-OM-W002

(High pump head Rated current of leak voltage x size [Optional]) current (A) [mA] HRR012-A/W-101-phase AC100V (50/60Hz) 15 30 1-phase HRR018-A/W-10AC115V (60Hz) HRR012-A/W-2010 30 HRR018-A/W-203 cores x 14AWG HRR024-A/W-20(3 cores x HRR030-A/W-20HRR012-A/W-20-T 2.0mm2) 1-phase HRR018-A/W-20-T HRR024-A/W-20-T HRR030-A/W-20-T (including 200-230V AC ground) (50/60Hz) 15 30 HRR012-A/W-20-T1 HRR018

Environment

How to Order w e r t q y u i o !0 !1 !2 !

Vacuum Pad

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

Vacuum Pad

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

Vacuum Pad

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

Vacuum Pad

W Dimensions: With Adapter ZP2-T W-B5 ZP2-T 20 W-B5 7 7 20 8 12 11 M5 x 0.8 M5 x 0.8 4 4 6 6 A (14) (14) 8 8 Y Y a A a C C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-T3507W-B5 ZP2-T4010W-B5 ZP2-T5010W-B5 ZP2-T6010W-B5 ZP2-T4020W-B5 ZP2-T5020W-B5 ZP2-T6020W-B5 ZP2-T8020W-B5 2 x 1.5 0.5 0.5 10 11 2.5 0.8 ZP2

•

4 Urethane tube H&lil 6 Urethane tube M8X1 AS 012 1>8 0110 1>1. 1>20' 1>32 40I>li~ Symbol T hread diafP"cft size ~} 16 2 4 6 8 10 13 20 25 32 40 50 Type AatlvDe Aat with rib ,o..ep \YIJ8 U4 UlS !!' .!!l t ~lI>h~... M10X1 AlO I'!

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

0.4

4 w !1 !3 r !2 e u t 61 Exploded View of Manifold F kit P kit J kit G kit T kit L kit S kit M kit Construction Semistandard Housing assembly and SI unit no. No. Manifold Part no.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

Modular F.R.L. Unit

t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

Table of Contents

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Free Mount Cylinder Series CU

(mm) D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) A B W A B W A B W 6 10 16 20 25 32 13.5 5.5 3.5 (1) 17.5 9.5 0.5 17.5 9.5 1.5 12.5 9.5 7.5 (5) 16.5 13.5 3.5 16.5 13.5 5.5 16 11.5 9.5 (7) 20 15.5 5.5 20 15.5 7.5 20 15 24 19 9 24 19 11 13 (10.5) 22.5 16 26.5 20 10.5 26.5 20 12.5 14.5 (12) 23.5 18.5 27.5 22.5 12.5 27.5 22.5 14.5 16.5 (14) Note 1) Figures in the table above are used

1.1

Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water

ZP3

Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

q w e r t y u i o !

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K