5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly 10 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

LG1H

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

o

ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

o

ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

Cylinder

-I ~ ime-sions~m ~-~~~--~-Nose mount: CO JPB u \2~ . c: n p w , ,," B' p I./l,ao~ hab ,/ (' B Rod end without thread w ",. /"(2 " .' ,," / ro~ ~ e ~With , autO sw.itCh Bore size w i (mm) 15S): 20~t ; .

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Direct Solenoid

T Optlonal Nvs 4 Ll 1 4Type of acluallon E = 44" Elecrrical L6ads M = hlerla@ speed conlrol P = Di. quS-inConnecior P1 = Din Top $lh light lnor ailable clas 2-5) P5 = Din w/6ll. prewned cord P6 = Oln Top w^ighi and 6 tt. prewned cord +Fl : sPF0101 Si.gle InlerlEe R9.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

AC Servo Motor Driver (Pulse input type/Positioning type)

7) 0V [1] Power supply input terminals, L1 and L2: Specify power supply to input terminals L1 and L2. [2] Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

DOC1023126

Power [W] Note8),9) Max. 86 Max. 109 Type Note10) Non-excitation-operated type specification Lock unit Holding force [N] 47 78 157 294 75 108 216 421 Power consumption [W] Note9) 5 5 Powre supply voltage [V] DC2410% Note1HorizontalUse an external guide (external guide friction coefficient: 0.1 or less).

HRX-OM-Y120

HRX-OM-Y120-D Operation Manual Communication function Thermo-chiller Air-Cooled refrigerated type Water-Cooled refrigerated type HRL100-A-20/40 HRL100-W-40 HRL200-A-20/40 HRL200-W-40 HRL300-A-20/40 HRL400-A-40 Keep this manual available whenever necessary 2023 SMC CORPORATION All Rights Reserved To Users, Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product

CEx-OMB0075

20 equivalent Tube I.

NAIV

Erlanger, KY 41018 TEL: (859) 647-5600 FAX: (859) 647-5609 SMC Corporation of America (Phoenix) 2001 W Melinda Lane Phoenix, A285027 TEL: (623) 492-0908 FAX: (623) 492-9493 KOREA SMC Pneumatics Korea Co., Ltd. CHINA SMC (China) Co., Ltd. SIt/C Pneumatiques (Canada) Ltd.

DOC1023125

225 401 to 500 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750 8 to 400 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 601 to 700 20 to 630 12 to 420 6 to 230 3 to 115 24 to 930 16 to 620 8 to 310 4 to 125 30 to 1200 20 to 900 10 to 440 5 to 220

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, THERMO-CHILLER, OTHERS, HRS THERMO-CHILLERS, 2X, HRS - NO SIZE RATING, 152.11896 lb