Combination Cylinder (mm) A A1 E1 L1 MM U1 NX NZ L R1 R Part No.
thread 10.2 10.2 MB 10.2 A K f N N f K A l + Stroke 10.2 l h + Stroke ZZ + 2 Stroke S + Stroke h MB1 CA2 Without Air Cushion CS1 Stroke range Width across flats Bore (mm) Eff. thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W S ZZ CS2 32 40 50 63 80 100 to 1000 125 6 8 11 11 13 16 16 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72
Unit Series AC10 to 60 Dimensions Pressure gauge port size AC10/20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) F.R.L.
11.8 18.2 2.8 depth 8.4 PF2M711/721W-C8(-L) 88 12 20 2.8 depth 6.2 PF2M711/721W-N7(-L) 88 10.3 20 2.8 depth 6.2 -104No.PF-OMW0007-E PF2M7#S-#1/2(-L) (mm) Model A B P Q PF2M705/710/725/750S-01(-L) 94 14 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-N1(-L) 96 14 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-F1(-L) 98 14 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-02(-L) 98 17 2.8 depth 6.2 2.5
L R L R Note) L: U side mount R: D side mount For details, refer to page 3-8-47. EXH block disk When valve exhaust affects the other stations on the circuit or when the reverse pressure valve is used to standard manifold valve, insert EXH block disk in between stations to separate valve exhaust.
D Double acting Acting 16 16 mm Nil 20 20 mm Q Rod piping/Male thread 25 25 mm Bore size Stroke (mm) 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.
Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H J
Bore MM A D L R N W Flat Round TDH10 TZ TY TX TN TW TK TV Part No.
LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) M4 x 0.7 1.4 LEHF10 LEHF20 LEHF32 LEHF40
0, thus allowing the condensate to drain out. 24 AF10 to 60 Construction AF10, 20 AF30, 40 AF50, 60 OUT IN OUT IN IN OUT q q q r r w w y e e t t w r e Drain t Drain Drain Parts list Material Description Color No. AF10, 20 Die-cast zinc AF30, 40, 40-06 AF50, 60 Platinum silver Platinum silver 1 6 Body Housing Die-cast aluminum Die-cast aluminum Air filter replacement parts Part no.
) U G1/2 L L G1/2 H E H E U F F 2 P 2 P G G Port size Port size Faston terminal A B C D K J I 1/4 Exhaust port 11 Q R S 12.5 L H E U F G 2 P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A< 80 118 23.5 62.5 39 16.5 30 2 136 112 112 78 185 40 Conduit terminal Conduit Faston terminal Model Q R U T Q R 99.5 20 169 68.5 47.5 20 VXF24A< Q R U 169 23 20 175 U 14
(Displays 0 when the value is below 10 L/min) 40 to 2100 L/min 20 to 1050 L/min (Displays 0 when the value is below 40 L/min) 2.0 0 to 2%F.S. (Displays 0 when the value is below 20 L/min) 60 to 2100 L/min 30 to 1050 L/min (Displays 0 when the value is below 60 L/min) 3.0 0 to 3%F.S.
Description Material Note AC servo motor Lead screw Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover R Motor cover L Auto switch Magnet 100 W Aluminum alloy Aluminum alloy 1 2 3 4 5 6 7 8 9 12 13 14 15 16 17 18 19 20 21 Ball screw High rigidity direct acting guide Coupling Bearing R Bearing F Body A Table Housing A Housing B Top cover IIR PC PC PC PC PC Aluminum
M L M L M L M L 472 Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 10, 16, 20, 25, 32 How to Order Port thread type M thread 10 to 20 Nil Rc 1/8 TN 25, 32 NPT 1/8 16 150 CXWM TF G 1/8 150 J79W DB 16 C XWM With auto switch Made to Order Refer to page 474 for the Made to Order specifications.
M L M L M L M L 472 Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 10, 16, 20, 25, 32 How to Order Port thread type M thread 10 to 20 Nil Rc 1/8 TN 25, 32 NPT 1/8 16 150 CXWM TF G 1/8 150 J79W DB 16 C XWM With auto switch Made to Order Refer to page 474 for the Made to Order specifications.
R L NE C NG R R L L G R L A N L R Z + Stroke Slide table operating direction (mm) Model MY3A16 MY3A20 MY3A25 MY3A32 MY3A40 MY3A50 MY3A63 MM M4 x 0.7 N 6 M 55 A 6 B 18 C 2 E 9.5 G 27 H 5 HG M4 x 0.7 JJ 5 KK 65 L 3.5 LD 22.5 LL 41 LW 13.5 M4 x 0.7 15.5 6 64 7.5 22 2 9.5 32 6.5 M4 x 0.7 8.5 80 4.5 24 51 M5 x 0.8 20 8 75 9.5 25 2 14 37 7.4 M5 x 0.8 7.5 95 5.5 27.5 61 M5 x 0.8 22.5 8 96.5 11 32.5
(cm) 32 20 80.7 8+Lo 10 15 5+L o 15 45.5 6.5+Lo 6 6.48 3.6+Lo Bore size (mm) 40 Allowable load weight (WA)(kg) 6.
pulse converted value setting pulse converted value PLS1_L U8 0 Y 0: 100 (L/pulse) 1: 1000 (L/pulse) OUT2 accumulated 1520 0x05F0 0 R/W 3000/6000 L range 0: 1 (L/pulse) 1: 10 (L/pulse) 12000 L range 0: 10 (L/pulse) 1: 100 (L/pulse) 1530 0x05FA 0 R/W PLS1_Ft3 U8 0 Y 0: Add (Addition) 1: dEC1 AC (Setting of the accumulated flow output direction) Setting of the accumulated flow output direction
VD BG L9 E1 R E2 R With rod boot d d e e 10.2 10.2 f l h 10.2 10.2 l + Stroke f * For one side rod boot type, a rod boot is mounted on the lock side (left side of the drawing above).
The rotation range under the adjustment of an angle at 60 is indicated below. The rotation range under the adjustment of an angle at 60 is indicated below. e g n a r n o e ti g a n t a o r R n io R Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clockwise direction.