5

MQ D-G5, K5, G5lW D-K59W, D-G59F, D-G5NT 20 to 100 D-C7, C8 20 to 63 RHC 8.5 Auto switch 12 Auto switch Hs Hs RZQ 24.5 16 B 33 A B 26 A D-H7l, H7lW D-H7NF 20 to 63 D-C73C, C80C 20 to 63 8.5 Auto switch 8.5 Auto switch Hs Hs 16 16 B 29 A B 36.7 A D-H7C 20 to 63 D-B5, B6, B59W 20 to 100 12 Auto switch Hs 8.5 Auto switch Hs 24.5 16 B 38.2 A B 33 A (mm) Auto Switch Mounting Height Auto Switch

Possible to transfer a workpiece at low-speed.

Change of double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination

Programless controller Step motor (servo 24 VDC)

LEP6 LEP10L LEP10 J K J K J K Low 7 14 12 24 12.5 25 Pushing force [N] Middle 8.5 17 16 32 19 37.5 High 10 20 20 40 25 50 Pushing speed [mm/s] 20 10 20 10 20 10 Pushing force accuracy is 30%F.S. for the LEP6 and 25%F.S. for the LEP10. Refer to the operation manual of the electric actuator for details.

NCA1

B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in) MM KK A AA B BA C D DD E EA EE G J R TN WF XT Y LF P A PB PC 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 1

NCA1

J G R CM2 WF E TL TL LF + Stroke ZB + Stroke A CG1 MB TD0.001 0 ZB P LF Y WF TL R J G Bore size (in) MM KK A AA B C D DD E EA EE 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 1 4 3/4 2.36 3 5/8 1.71 1 1 1.43 1.1 1.26 3/8 MB1 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 1 4 3/4 2.4 3 5/8 1.71 1 1 1.84 1.06 1.26 3/8 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16

Smooth Cylinder/Low Speed Cylinder

D-G5, K5, G5W D-K59W, D-G59F, D-G5NT 20 to 100 Hs D-C7, C8 20 to 63 8.5 Auto switch 12 Auto switch Hs 24.5 16 16 16 16 24.5 B 33 A B 26 A D-H7, H7W D-H7NF 20 to 63 D-C73C, C80C 20 to 63 Auto switch 8.5 Auto switch Hs 8.5 Hs B 36.7 A B 29 A D-B5, B6, B59W 20 to 100 D-H7C 20 to 63 12 Auto switch Hs Hs 8.5 Auto switch B 38.2 A B 33 A Auto Switch Proper Mounting Position Auto Switch Mounting

NCA1

How To Order NC D A1 B 150 0400 R + 0200 H XC11 Auto Switch Mounting Bore Stroke B-A Stroke B Dual Operation Single Rod Cushions Both Ends N w/o Cushions H Head End R Rod End Dimensions (in) Bore (in) MM KK A AA B BA C D DD E EA EE G J NT TN WF XT Y LF P A PB PC 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1/4-20 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200

Electric Slide Tables

2 sections (50, 100 st) 3 sections (150 st) 22 60 +0.030 0 5H9 ( ) depth 5 6 depth 5 5H9 ( ) +0.030 0 G x M8 x 1.25 x 16 A G x 11 38 2 x M8 x 1.25 x 16 Top mounting not available G x 6.9 8 39.5 A J (G/2 1) x J F 12 Connector With lock Step motor Lock cable (3.5) Motor cable (2 x 5) Motor cable 20 20 20 Lock cable (2.2) 65 117 Cable length 180 15 [mm] L B D E F G J K Model LESH25D-50LESH25D

Modular F.R.L. Units

Note 3) Bowl O-ring and other O-rings are slightly lubricated. 20 Series AC20D-A to AC40D-A Dimensions AC20D-A AC30D-A to AC40D-06-A 2 x P1 (Port size) 2 x P1 (Port size) A F J J M A F J J M S S R C B R C B V Q1 Q1 V Q2 Q1 Q1 OUT IN IN OUT H H Pressure gauge (Option) Pressure gauge (Option) U U Clearance for maintenance G Drain Drain P2 (Pressure gauge port size) E Clearance for maintenance

New

< VXF27B< VXF28B< 20 20 20 20 23 23 23 23 102 105 105 105 20 20 20 20 68.5 68.5 68.5 68.5 108 111 111 111 47.5 47.5 47.5 47.5 20 20 20 20 18 Series VXF2 Dimensions on the Mounting Side: Flange type VXF25B<<< VXF26B<<< 8 x M10 x 1.5 x 20 /C1 8 x M8 x 1.25 x 20 /C1 7 x 45o 7 x 45o 22.5o 22.5o A A A A 166p0.2 178p0.2 A-A A-A The surface roughness of the orifice machining should be Rz6.3 or less

AC

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

ZP

B C D J K Y A J K B Y C D Misc.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52

7

L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T

LX

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.

MXS

0 A B NN-M4 X 0.7 thread 8 deep MGG 4 MGC 1 MGF 7 7 6.5 3.2 CY1 A B 11 5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L

CL

range (mm) Bore (mm) AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J A Without rod boot to 500 to 600 to 600 to 750 to 750 With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 MXW 40 50 63 80 100 27 32 32 37 37 60 70 86 102 116 96 108 115 129 140 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 113 124 15 17 17 21 21 26 27 26 30 31 54 59 67 72 76 10 13 18

Combination Cylinder

CY MY 3.1-61 Series CL1 Centre Trunnion/(T) (A) Lock-up at piston forward (B) Lock-up at piston backward 40 to 100 125 to 160 (mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL B B1 BX BY C D EA EB F GA GB GC H1 J K KA FA BP W/o rod boot to 500 to 600 to 600 to 750 to 750 25 to 1000 30 to 1000 35 to 1200 W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000