0.4

e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2)

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

CRBU

Order Size 10 15 20 30 40 CRBU2 10 180 S E W Without auto switch Connection port location Size 10 15 Nil E Side ported Axial ported 90 L 180 S CDRBU2 10 W With auto switch Size: 10, 15 Axial ported Side ported CDRBU2 20 W 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

Electric Slide Tables

Black U V W Connector B terminal no.

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

15

800 B 10 600 400 C 5 300 200 LEY32l Motor mounting position: Top/Parallel 200 W equivalent (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W equivalent (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l 400 W equivalent (Motor rotation speed) (3000

Air Cylinder

D-X Technical Data 315 CG1W Series With Mounting Bracket Axial foot: CG1WLl LH B 15 LT LZ LX 2 LC (Knock pin position) W X Y Z LS + Stroke X M Y W 4 x LD (mm) Bore size Stroke range B LC LD LH LS LT LX LZ M W X Y Z 20 Up to 1500 34 4 6 20 53 3 32 44 3 10 15 7 47 25 Up to 1500 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 32 Up to 1500 45 4 7 25 53 3 44 58 3.5 10 16 8 53 40 Up to 1500 54.5 4 7 30

JXCx-OMT0023

LE--B series Servo motor LE-S1-B LE-S2-B LE-S3-B LE-S4-B Item (50W) (100W) (200W) (400W) Type (Note 1) Spring-loaded safety brake 0 -10% Rated voltage (Note 4) 24VDC Power consumption [W]at20 6.3 7.9 Coil resistance (Note 6) [ ] 91.0 73.0 Inductance (Note 6) [H] 0.15 0.18 Lock static friction torque [N m] 0.32 1.3 [oz in] 45.3 184 Release delay time (Note 2) [s] 0.03 0.03 Locking delay time

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(mm) G GP H HB HG HP A HS HT HA D FB FA d EA EB B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5 40 34 12 10 3 6.5 10 12 33 14 25.5 PA J x K LD (N) PB PW Q S ta tb TT T QW W Z L Model CY1S6 CDY1S6 M4 x 0.7 x 6.5 40 3.5 10 25 25 50 52 16 42 10 16 46 68 CY1S10 CDY1S10 M5 x 0.8 x 9.5 45 4.3 9.5 25 38 60 60 24 47 12.5 20.5 0.5 1.0 58 80 PA

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

ZP3

to 16 w q ZP3 B N 10 9 Model A B C q Pad dia.

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

Table of Contents

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

VFR

1, Metal joint q, w, Gasket A e, Guard !3 !1 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

NCM

) A B EA EB KK MM NA NB NE NN W Y ZC ZD 0 0.004 0 0.004 044 (7/16") 056 (9/16") 0.50 0.50 0.437 0.437 0.669 0.654 0.520 0.197 0.197 0.59 0.50 0.38 0.19 0.19 0.38 0.38 0.72 0.75 0.05 0.06 No.10-32 No.10-32 7/16-20 7/16-20 No.10-32 No.10-32 075 (3/4"), 088 (7/8"), 106 (1-1/16"), 125 (1-1/4"), 150 (1-1/2"), 200 (2") ZB + Stroke Y W 0.50 K E NE A ZC ZD MM N NC B Pilot NN-Mounting Nut (incl.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Symbol Specifications DC AC VQZ1000 VQZ1000-GS-2 (0.35 W) Nil Standard VQZ2000 VQZ2000-GS-2 (0.9 W) B Note) High speed response type VQZ3000 VQZ3000-GS-2 High pressure type (Metal seal type only) (0.9 W) K Note) Note) Above part number consists of 10 units. Each unit has one gasket and two screws. Purchasing order is available in units of 10 pieces.

10

A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.

Aluminum High Vacuum Angle Valve

) 1.3 x 10-8 Nil A B C None w, e w e DSeal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

LEC-OM02704CN

[0][0]0) OFFONCC-Link 14 39 14 14.5.9 (1) 0()5( 6) (a) [3][3][1][0][1][5]14.4.1 (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][3][2][0][2][5] 14.4.1 (b) 10 16 10 01F5501 (3) [8][2][2][0] [8][2] [2][0] 1EA5 14 40 14 14.5.10 (1) (a) [0][2][0][0] [0][2] [0][0] (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][5][8][0][8][E] 14.4.1 (b) 0 0 32bit 16 () 0 10 1 16 0 11 22

Table of Contents

4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !