Vacuum Pad -T 30 W-B5 7 19 30 M5 x 0.8 4 6 (14) 8 Y Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 C 0.5 30 31 2 x 2.5 0.8 18 Series ZP2 How to Order ZP2 T K 3507 W N 10 B5 With buffer Vacuum inlet () Vacuum inlet direction Symbol Applicable tube O.D.
-T 30 W-B5 7 19 30 M5 x 0.8 4 6 (14) 8 Y Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 C 0.5 30 31 2 x 2.5 0.8 18 Series ZP2 How to Order ZP2 T K 3507 W N 10 B5 With buffer Vacuum inlet () Vacuum inlet direction Symbol Applicable tube O.D.
-T 30 W-B5 7 19 30 M5 x 0.8 4 6 (14) 8 Y Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 C 0.5 30 31 2 x 2.5 0.8 18 Series ZP2 How to Order ZP2 T K 3507 W N 10 B5 With buffer Vacuum inlet () Vacuum inlet direction Symbol Applicable tube O.D.
-T 30 W-B5 7 19 30 M5 x 0.8 4 6 (14) 8 Y Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 C 0.5 30 31 2 x 2.5 0.8 18 Series ZP2 How to Order ZP2 T K 3507 W N 10 B5 With buffer Vacuum inlet () Vacuum inlet direction Symbol Applicable tube O.D.
Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.
of rated voltage Coil insulation type Equivalent to Class B 3-position pressure center 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA) 100 VAC Power consumption (Current) 4-position dual 3-port valve Note) (A) Inrush 1.0 VA (9 mA), Holding 1.0 VA (9 mA) 4 2 110 VAC 1 5 3 Inrush 1.26 VA (
ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard
End plate t t Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 SUP port EXH port Label for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) VZ3000-123-1A t t Series Assembly part no. Port size Series Assembly part no.
A30 Symbol: A29 Symbol: A28 Symbol: A27 DA 30 H1 30 30 30 H1 W H1 E DA W X T T C1 F L X L F X X L H1 L 182 Series CQ2 Made to Order 1 Please contact SMC for detailed dimensions, specifications, and lead times.
. 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT .
Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water
How to Order w e r t q y u i o !0 !1 !2 !
0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !
I '" ~ 1 Width across M5XO.B flats 8 "l t w Width across M8X 1.25 flats 12 t= II >:, 0 ] ", ) W >:loJ " ~ ~ Flat with rib Flat with rib !ll. M ,8 , ~ iiI ,. Deep type/ ZPT4OD only Deep type/ZPT25D only , Appl cable t be 0 D 91 ~ I One-touch " Applicable tube 0 0 One-touch tube fitting Wldt~~across ~~. Width across fl 1 ~ flats 8 tube fitting IS " M6XO.75 !
10-8 Nil A B C None w, e, r, t w, r, t e 1.3 x 10-11 (FKM) 1.3 x 10-9 DSeal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.
For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]
CQS Single Acting, Spring Return (mm) D-M9, D-M9W D-M9V, D-M9WV D-A9, D-A9V Bore size (mm) CQ2 Stroke A B W A B W A B W 6 2.5 (5) 6.5 4.5 4 4 0 All stroke 17.5 17.5 13.5 RQ 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 1.5 (1) 2.5 0.5 7.5 7.5 3.5 CQM 16 2 (0.5) 2
15 D-M9m D-M9mW C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch n 10 + 40 (n 2) /2 n = 2,4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 D-M9mV D-M9mWV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 15 10 15 D-M9mA n 15 + 40 (n 2) /2 n = 2, 4, 6, 8 10 + 40 (n
Applicable solenoid valves: Type 10-SYJ312M Type 10-SYJ322M (10-SYJ300 3 port valve) (10-SYJ300 3 port valve) w 10-SS5YJ3-31/-S31, 10-SS5YJ3-32/-S32, 10-SS5YJ3-46/-S46, 10-SS5YJ3-32P The 3 port valve can be used without modification. The A port of the valve will flow out of the B port of the manifold.
r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR 13 PWR e 15 e t y y t Shown with cover removed.