LEC-OM02904

U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.

Air Cylinder Series MB

5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

Modular F.R.L. Units

1 q r e w t i u y o !0 !

ZP

ZPY25D10--A10 59 93 23 Flat with ribs U C ZPY25D20--A10 ZPY20 -A10 69 131 20 23 28 14 24 1.7 1.8 4 42 51 ZPY25 -A10 U C ZPY25D30--A10 79 141 25 ZPY32 -A10 U C 77 ZPY25D40--A10 89 177 42.5 32 35 14.5 24.5 2.3 4.5 99 187 ZPY25D50--A10 Dimensions by Stroke Dimensions by Tubing 20, 25 32 H Model F G F G Model J K L U C U C U C U C ZPY-4-A10 ZPY 10--A10 5 1.8 14.5 87 53.5 53 87.5 23 ZPY-6-A10

Air Slide Table

125 Made to Order Page 127 Model Selection Page 157 Specific Product Precautions Page 195 Safety Instructions Back Cover 10 Air Slide Table Double-ported Type How to Order 6, 8, 12, 16, 20, 25 MXQmA Series RoHS 30 ZA MXQ 12 M9BW A q w e r t y u i t Functional options u Number of auto switches q Bore size Body option: w Double-ported type e Standard stroke [mm] A 6 10, 20, 30, 40,

EX120/121/122

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

Fieldbus System

SS5Y5 10 NA 05 N M S U C 8 6 Refer to page 20 for Type 11/ Bottom ported dimensions. Mixed Mounting Type q w e r t o y !0 u i It is possible to mount SY3000 size valves on all stations. In this case, there is no need to fill in part i in the order code.

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

LVQ

25 80 B A V S 37.5 6 7 20 25 80 D V S 50.2 10 7 20 38.5 110 60 10 7 20 38.5 110 LVQ60 available only as V.

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

ZP

114.6 202.6 ZPR25D50-0-A10 Dimensions by Stroke One-touch Fitting 20, 25 32 J Model G H G H Model K L M U C ZPR 20-0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPR 10-0-A10 ZPR-04-A10 68.6 23 102.6 69.1 103.1 4 10.4 23.3 ZPR-06-A10 78.6 140.6 79.1 141.1 6 12.8 24.3 51 8 15.2 26.2 ZPR-08-A10 88.6 150.6 89.1 151.1 98.6 186.6 99.1 187.1 77 108.6 196.6 109.6 197.1 13-11-40 41

Table of Contents

F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No. VVQ1000-57A-3 2 pcs. per one 16 16 24 18 24 16 stations 16 stations 16 stations 14 14 8 Max. points When ordering DIN rail only Negative Common Specifications DIN rail no.: AXT100-DR-n Refer to the DIN rail dimension table for determining the length.

Air Cylinder

0 t u !4 q e o !3 r w i !2 y u 20 to 32 Component Parts Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 20 CG1KWN20Z-PS Set of the nos. !1, !2, !3, !4 No.

SZ3000

Specifications Standard/internal pilot specifications External pilot specifications 20 20 stations U side D side w How to Order Valves Enter the symbols for the required specifications in the blanks below.

Step Motor Controller

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V , W) Control Circuit Power Supply Connector: CNP2 Accessory 24V Terminal name Function Function details 0V 24V side of the control circuit power supply (24 VDC) which supplies the controller.

45

desired than the specified stations, specify the station number to be required. (20 stations maximum) Mounting position Symbol Stations U side Stations Symbol D U D side U side 2 to 10 stations 02 2 stations Manifold base (5 stations) B 2 to 20 stations Both sides M Special specifications SS5X3-45-05DRS-C6 20 20 stations For special specifications, indicate separately by the manifold specification