Fluoropolymer Piping Equipment

8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1/2" x 3/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 3/4" x 5/8" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 3/8" x 1/4" 1/8" x 0.086" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/8" x

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

X6 11-7-32 to 11-7-51 Shaft, Bolt, Parallel key stainless spec.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

on page 11-7-24.

High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

Aluminum High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

Rotary Actuator

7 !4 !3 !2 y u !8 !9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

XL

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

Multi-Axis Step Motor Controller

(Refer to page 12.) 7 4-Axis Step Motor Controller (Parallel I/O/ Type) JXC73/83/93 Series JXC92 JXC73/83/93 How to Order Parallel I/O (JXC73/83) JXC 7 3 2 Controller I/O type I/O cable, mounting Symbol I/O cable Mounting 1 1.5 m Screw mounting 2 1.5 m DIN rail 3 3 m Screw mounting 4 3 m DIN rail 5 5 m Screw mounting 6 5 m DIN rail 7 None Screw mounting 8 None DIN rail Symbol I/O type 7

High Vacuum Angle Valve, XL Series

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 01 (R 1/8), Attachment: None, Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Attachment: None, Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 15 (1.5MPa), Connection Thread: 01 (R 1/8)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 01 (R 1/8)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 01 (R 1/8), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Environment

(The lock cable is included when the motor with lock option is selected.) *7 Standard cable entry is (A) Axis side. i Cable length [m]*5, *8 o Driver type*5 25A25ANil Without cable 2 2 5 5 A 10 Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to