VK3000

stations VS4 Nil F N T Rc 01 1 station G NPT VQ7 20 20 stations NPTF A port: M5 x 0.8 EVS B port: M5 x 0.8 Applicable solenoid valve VK3140 VK334 Type 41: Base mounted (A, B port side ported) How to Order VFN Type VK3140 VV5K3 41 05 M5 Type VK334 Applicable blanking plate assembly VK3000-7-1A Solenoid direction Valve stations 01 Solenoid on same side of A and B port 1 station Nil P port:

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 7 to 8) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 7 to 8) 1 setBlanking plate part no.

EX500-GPR1A.eng

Application 8 7 6 5 4 3 2 Communication connector 1 9 Ground terminal Used for grounding EX500 Part Names Station number switch protective cover Set address and bus terminator by using the switches under this cover. ( Note2 ) Display Communication port D ( COM D ) Communication port C ( COM C ) Communication port B ( COM B ) Communication port A ( COM A ) Power supply connector Display the

Shock Absorbers and Rate Controls

l llunbcr llodel (Rell B C .05 t) t t G Eolt Slts w?isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!

VQ4000

7 () (+) Blue None SOL.A SOL.B 20 20 () (+) Red White 7 stations SOL.B Stations are counted starting from the first station on the D side.

PSxx-OMM0006CN

ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1

Table of Contents

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

5 Port Air Operated Valve

dm3/ (s/bar)] b Cv C[dm3/ (s/bar)] b Cv Single 0.49 0.40 0.13 0.52 0.35 0.13 97 VFA120-M5 2 position M5 x 0.8 Double 0.49 0.40 0.13 0.52 0.35 0.13 120 Single 0.76 0.22 0.17 0.53 0.28 0.13 93 VFA120-01 2 position 1/8 M5 x 0.8 Double 0.76 0.22 0.17 0.53 0.28 0.13 116 Single 3.0 0.38 0.78 2.8 0.30 0.67 135 2 position Double 3.0 0.38 0.78 2.8 0.30 0.67 158 Closed center 2.4 0.31 0.64 1.8 0.37

Vacuum Pad: Ball Joint Type

flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke: 20 to 50 mm Dimensions: 10 mm Stroke (mm) B A C D F H I J Y Model ZPT40F10-01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30 +20 +15.5 +40 50 +25 +60.5 716 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry: With Buffer ZPT

Display Pressure: 0.7MPa, Connection Thread: R 1/8, Grade: Precision Cleaning, Clean Room M5.5, Attachment: -

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: None, Option: Nickel Plated

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: None, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: None, Option: X3 [Wetted Parts Stainless Steel (Movable Parts Inside are Brass)]

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.7, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/8, Option: None, Size: 42.5, Grade: Parts: general degreasing, Assembly: general production line, Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly, Unit

Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Grade: SRB (General Degreasing, Production Line)

Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Grade: SRA (Precision Cleaning, Clean Room M5.5)

REC

11 13 13 0.5 10 10 50 100 200 300 400 (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 MK(2) Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 Clevis style: C, D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Cable length (L) 10 pins 20 pins 26 pins (7.5) L 8 AXT100-FC10-1 AXT100-FC20-1 AXT100-FC26-1 1.5 m AXT100-FC10-2 AXT100-FC20-2 AXT100-FC26-2 3 m 5.5 AXT100-FC10-3 AXT100-FC20-3 AXT100-FC26-3 5 m (35) (25) Connector width (W) 17.2 30 37.5 For other commercial connectors, use a type with strain relief conforming to MIL-C-83503. Rail mounting hole pitch: 12.5 0 1 2 3 4 5 6 7 8 9 No.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006