Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

SI Unit for Vacuum Manifold

.+100 Name Range of values Setpoint P2 21999 P1+H299.9 P1+H299.9 750 Set the value for energy saving function and vacuum/release confirmation. The value of P2, P1 represents negative pressure, the value of P3 represents positive pressure. Enter a value that is 10 times the pressure value [kPa]. ex) P2 = -65 [kPa] -> P2 sets 650 Refer to Section 4.1.7.

HRX-OM-X010

Connect the communication cables with P1 and P2.

HRX-OM-I051

Connect the communication cables with P1 and P2. P1 (D-sub 25P female) Cap P2 (D-sub 9P female) P3 (D-sub 9P male) Not used. (Only for maintenance) Power cable Contact signal cable Serial RS-485 communication cable Figure 3-10 Power Cable Insertion and Communication Cable Connection Correct phase rotation is required when attach the power cable to the breaker terminal.

HRX-OM-K003

Connect the communication cables with P1 and P2. Cap P1 (D-sub 25P female) P2 (D-sub 9P female) P3 (D-sub 9P male) Not used. (Only for maintenance) Power cable Contact signal cable Serial RS-485 communication cable Figure 3-7 Power Cable Insertion and Communication Cable Connection Correct phase rotation is required when attach the power cable to the breaker terminal.

Digital Pressure Switch

Rated pressure range A B ZSE3 0 to -101 kPa 0 -101 kPa ISE3L 0 to 98 kPa 0 98 kPa ISE3 0 to 0.98 MPa 0 0.98 MPa -25No.PS-OMO0002-A Dimensions Grommet type Z/ISE3-01/T1-26No.PS-OMO0002-A Connector type Z/ISE3-01/T1-C -27No.PS-OMO0002-A Single-installation type Grommet type ZSE3-0X-28No.PS-OMO0002-A ZSE3-0X--D -29No.PS-OMO0002-A Connector type ZSE3-0X-C -30No.PS-OMO0002-A ZSE3-0X-C-D -31No.PS-OMO0002

Table of Contents

" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17

4/5 Port Solenoid Valve

connector (L): SYJ5140-L-01 M plug connector (M): SYJ5140-M-01 DIN terminal (D): SYJ5140-D-01 M8 connector (WO): SYJ5140-WO-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 82.6 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 M8 x 1 49 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 73.5 [75.7] 63.7 [65.9] 83.5 65.2 72.6 58.7 0.5 45.5 45.5 45.5 45.5 17 17 17 17 17

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 01 Conduit terminal: VF1120-T-M5 01 DIN terminal: VF1120-DVF1120-YVFN Applicable cable O.D. 6 to 8 Applicable cable O.D.

Table of Contents

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

SYJ3000/5000/7000

length) 63.6 [65.8] 107.5 [109.7] (Light/Surge voltage suppressor) 54.2 69.6 [76.6] 50.1 [57.1] + 45 34.7 8.5 31.5 21.5 6 6 17 17 43.9 15 1/8 (P, R port) 45.5 32 24 L plug connector (L): SYJ5140-L-01 M plug connector (M): SYJ5140-M-01 DIN terminal (D): SYJ5140-D-01 M8 connector (WO): SYJ5140-WO-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 82.6 Max. 10 75.4 50.1 [

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ7120-5G-01 . 2 pcs. (Valve) SYJ7000-21-1A .1 pc. (Blank plate ass'y) PSS5YJ7-41-03-01 . 1 pc. (Manifold base) SYJ7140-5LZ .1 pc. (Valve) SYJ7240-5LZ .1 pc. (Valve) SYJ7000-21-1A .1 pc.

Free Mount Cylinder Series CU

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390

VCW

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9 10 Series VCW Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

VCW

Q=14.2Cv 10.2 P l/min Formula based on effective area (Smm2) Q=0.8S 10.2P l/min Q P P1 P2 S Cv : Flow rate (l/min) : Pressure differential (P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm2) : Cv factor 4.5-11 Series VCW 2 Port Solenoid Valve for Fluid Control Be sure to read before handling.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9

VZS2000

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

5 Port Solenoid Valve

Note 2) Specify wiring type of each station on the manifold In the case of the 16-output SI unit Symbol 01 Stations Note 1 station specification sheet. Double wiring Note 1) 08 01 8 stations 1 station Specified layout Note 2) (Available up to 16 solenoids) Note 1) Indicate the sizes on the manifold specification sheet in the case of CM.