CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Stainless Steel Heat

condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 3 Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

A

Note) (N)AM AM Japanese NAM North American H O W T O O R D E R M I S T S E P A R AT O R S E R I E S (N)AM (N)AM S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E Y Drain Guide 1/4 Internal Thread M With Drain Lock M5 Screw R IN, OUT Reverse Direction 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis O P T I O N S None B Bracket

MK

350 Rear flange 133 153 166 198 345 531 Calculation method/Example MKG20-10RFN I Standard calculation: MKB20-10R 250g I Extra weight calculation: Both ends tapped 6g Rear flange 133g Rear boss mounting 2g With arm 100g 491g 4.1-5 Series MK Construction MKl12, 16 MKl20, 25 With arm (N) MKl32 Rod end width across flats (M) Rear boss mounting (F) Rear flange (G) MKl40 to 63 Component Parts

MNB

Upper limit of allowable value Solenoid valve for locking mounted on the unlocking port Maximum value of stopping position dispersion from 100 measurements Spring Lock Holding Power (Maximum Static Load) 32 40 50 63 80 100 Bore size (mm) 552 {56} 882 {90} 1370 {140} 2160 {220} 3430 {350} 5390 {550} Holding power N {kgf} 2 Series MNB Bracket Part Numbers Rod Boot 32 40 50 63 MNB-L 80 100 Bore

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

lightweight Compact design with higher allowable moment compared to MXY8/MXW8 Long stroke Long stroke MX MXY12Max. stroke 400 mm MTS Width mm Height Model Allowable moment Nm g Weight mm Width Magnetically coupled rodless cylinder Series variations MY Pitch, Yaw Roll Stroke Adjuster options Function options 30 25 MXY8-50 50 100 400 Bore size (mm) 0.7 times 610 420 13 5.7 49 47 CY 300 200 350

SYJ300/500/700

9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Station 1) (Station n) (Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=17 14.5 (Pitch) P=16 14.5 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 Station n L1 L2 L1 L2 Station 2 52 43 53 44 Station 20 340 331 359 350

VZ100/300/500

(A port) (A port) VQZ VZ VS Stations n Port size 2 52 43 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 20 340 331 L1 L2 53 44 70 61 87 78 104 95 121 112 138 129 155 146 172 163 189 180 206 197 223 214 240 231 257 248 274 265 291 282 308 299 325 316 342 333 359 350

VQZ1000/2000/3000

1 R2 3 < >: AC Formula L1 = 19n + 11, L2 = 19n + 23 n: Stations (Maximum 20 stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Features 1 In-line Air Filter Filter Variations Flow rate under vacuum condition Flow rate under positive pressure Series AF AF10 AF20 to 350 L/min (ANR) For positive pressure For vacuum pressure to 100 L/min (ANR) to 350 L/min (ANR) ZFC77 Flexible mounting orientation Easy to install to the line Spacesaving to 20 L/min (ANR) to 100 L/min (ANR) ZFC54 to 100 L/min (ANR) ZFB ZFA to 200 L/min

Table of Contents

[mmHg] to [kPa]. 1 [mmHg] = 1.3332 x 101 1.3332 x 101 x 350 = 46.662 [kPa] Ex. 2) Convert the units of 80 [kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 x 102 [kgf/cm2] 1.01972 x 102 x 80 = 0.81576 [kgf/cm2] 16-13-13 1 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500 700 900 10 500 700 900 10 700 1,000 Flow rate Q l/min (ANR) How to read

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the C4, C6. 3 68 59 70 61 66 57 6 116 107 121 112 114 105 8 148 139 155 146 146 137 10 180 171 189 180 178 169 2 52 43 53 44 50 41 20 340 331 359 350 338 329 4 84 75 87 78 82 73 5 100 91 104 95 98 89 7 132 123 138 129 130 121 9 164 155 172 163 162 153 11 196 187 206 197 194 185 12 212 203 223 214 210 201 13 228 219 240 231 226 217 14 244 235

2/3 Port Valve

490 220 350 490 350 490 3 0.33 6 Individual SUP 3.0 5.0 0.45 0.2 0.2 0.15 4.5 0.61 11 0.75 0.35 0.35 0.3 1.0 0.9 0.55 0.85 0.4 0.15 0.2 0.1 0.5 0.35 0.35 0.3 6 1.05 19 Note 1) It is a grommet value.

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 3 78 69 63 80 71 65 Station 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 6 126 117 111 131 122 116 7 142 133 127 148 139 133 8 158 149 143 165 156 150 9 174 165 159 182 173 167 10 190 181 175 199 190 184 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245 239 267 258 252

In-line Air Filter

Features 1 In-line Air Filter Filter Variations Flow rate under vacuum condition Flow rate under positive pressure Series AF AF10 AF20 to 350 L/min (ANR) For positive pressure For vacuum pressure to 100 L/min (ANR) to 350 L/min (ANR) ZFC77 Flexible mounting orientation Easy to install to the line Spacesaving to 20 L/min (ANR) to 100 L/min (ANR) ZFC54 to 100 L/min (ANR) ZFB ZFA to 200 L/min

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

seal X42 Anti-corrosive guide unit X45 EPDM seal Mass (g) Stroke (mm) Stroke (mm) One side centralized piping, with switch rail One side centralized piping, without switch rail Model 250 300 350 400 200 380 620 1240 150 330 550 1130 100 280 480 1020 250 300 350 400 50 230 410 910 200 450 690 1320 150 390 600 1190 100 330 510 1060 50 270 420 930 MXY6 MXY8 MXY12 690 1350 760 1460 780 1450

Electric Rotary Table

Operating humidity range [%RH] 90 or less (No condensation) Weight [g] 350 (Except cable) [CE-compliant products] The EMC compliance of the teaching box was tested with the LECP6 series step motor controller (servo/24 VDC) and an applicable actuator.

Step Motor Controller

Operating temperature range 41 to 122F (5 to 50C) Operating humidity range [%RH] 90 or less (No condensation) Weight [g] 350 (Except cable) Note) CE-compliance The EMC compliance of the teaching box was tested with the LECP6 series step motor controller (servo/24 VDC) and an applicable actuator.