Compact

mm] L1 [mm] L1 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Horizontal/Bottom mounting 300 300 300 300 L2 200 200 200 200 L2 [mm] L2 [mm] L2 [mm] L2 [mm] m Y 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

No freezing (for cylinders with or without an auto switch) Bore Size/Standard Stroke Symbol Specifications (mm) XA Change of rod end shape Rod end configuration XC3 Special port location Bore size (mm) Round bar, Chamfered type Roller type Lever type with shock absorber 12 10 10 16 10, 15 10, 15 20 10, 15, 20 10, 15, 20 32 10, 15, 20 40 Spring Force (Single acting) 20, 25, 30 20, 25, 30

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-M9mAV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 15 + 30 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-A9m n 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 D-A9mV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 D-F5m D-F5mW

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Nil S n Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type 2 pcs. 1 pc. n pcs.

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Area: (800) 258-9200-www.stevenengineering.com 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20

Auto Switch Guide

Contact protection box CD-P11 C76 LED Brown OUT Brown Choke coil Resistor C85 Reed switch Zener diode Surge absorber C95 OUT Blue Blue Weight CP95 (g) D-A73 NCM D-A72 D-A73 D-A80 Auto switch model 10 10 10 0.5 NCA Lead wire length (m) 47 47 47 3 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 77 5 Resistor DReed switch Zener diode Dimensions -X OUT () Blue Blue 20Indicator

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

ISO Standard Hydraulic Cylinder

Built-in Symbol D Nominal pressure CHS CHS 1 pc. 10 MPa "n" pcs.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

XLAQ/XLDQ

(FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

CLS

8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL 7 7 7 6 6 B D-F5/J5

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

Compact Rotary Actuator Series CRQ2

Y = L2 = X = L1 = (mm) (mm) L2 6 (9 Y) to Y 7 (10 Y) to Y Y 3 to 9 3 to 10 L1 {10 (18 X) } to (X 2) {10 (20 X) } to (X 2) X 8 to18 10 to 20 Size 10 15 Size 10 15 Symbol: A11 Symbol: A12 Symbol: A13 Shaft with through-hole Minimum machining diameter for d1 is 0.1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

CJ2X/CUX/CQSX/CQ2X/CM2X

MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1.

Air Slide Table Series MXS

MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 10 20 30 40 0 0 0 Load (N) Load (N) Load (N) 8 8 8 Lr=50 mm 0.020 0.04 0.05 MXS8-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 MXS8-10 0.02 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40