Table of Contents

Contents 10 16 20 25 32 CU10D-PS CU16D-PS CU20D-PS CU25D-PS CU32D-PS Set of nos. above !4, !5, !6 Seal kit includes !4, !5, !6.

Micro Mechanical Valve Series VM1000

OFF 45 ON Max. 6 38 24.5 Symbol 3 port (A) 2 (A) 2 1.5 3 1.5 28 82 (110) 12 12 1 (P) R port (5 port only) 5 port (A) 2 (A) 2 12 12 1 (P) 3 (R) 3 (R) 32 16 40 R port (5 port only) 3 x 1/4 53.2 25 25 * 0.5 MPa supply 63.5 F .O.F .* 40 N T.T. 45 Foot pedal VM220-02-40A VM230-02-40A 3 x 6.5 mounting hole Symbol 2 port 54 71 (A) 2 152 12 10 159 1 (P) 177 3 port (A) 2 1/4 2(A) T.T. 12 10 1 (P)

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 40.1 39.3 18.8 18 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] 2-One-touch fitting One-touch fitting 2n1-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 [PE:

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

or less 0.12 or less 0.3 or less 8-25-5 5 Series MGZ/MGZR Series MGZR (without non-rotation mechanism) 1.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

R 32 DS5032 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 125 DS5125 140

LEC-OM069xx

.5-64 5.8.7 Torque Reference Filter.5-71 6.

0.4

Precautions X 12 P 1 (A, B port) 25 25 25 20 15.4 12 5 2.5 14.5 19.5 G 3/8 Electrical entry 39.1 5 x 1/4" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 43.8 53.6 < >: AC Note) When using this valve for IP65, mount a seal connector to the electrical entry. 54 Series VQ1000/2000 Semi-standard Different Number of Connector Pins F and P kits with the following number of pins are available besides the

17

100 Load mass m lbs (kg) Load mass m lbs (kg) 80 100 100 80 80 80 100 80 22 (10) 22 (10) 80 11 (5) 10 20 29 30 51 50 300 200 100 11 (5) 10 20 29 30 51 50 300 200 100 Stroke (mm) Stroke (mm) 13 Model Selection Series MGP L L m m Ball Bushing Horizontal Mounting (19) L = 50 mm, V = 400 mm/s (20) L =100 mm, V = 400 mm/s MGPL12 to 25, MGPA12 to 25 MGPL12 to 25, MGPA12 to 25 11 (5) 11 (5) 25

Compact 5-Port Solenoid Valve

Note SOL.a SOL.b (+) (+) () () 24 11 Station 11 1.5 m SY30M-DS25-015 Cable 0.3 mm2 x 25 cores 3 m SY30M-DS25-030 5 m SY30M-DS25-050 1.5 m AXT100-DS25-015 Cable 0.3 mm2 x 25 cores 3 m AXT100-DS25-030 5 m AXT100-DS25-050 Station 12 SOL.b SOL.a (+) (+) () () 25 12 * Be sure to use the connector cable in the table, to satisfy enclosure IP67. * Cannot be used for movable wiring * When using

CNG

8 Nickel plated Lock nut Clip A 25, 32 only Rolled steel Stainless steel %5 !

AC

0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4 36 2.0 60 3.3 70 3.9 36 2.0 60 3.3 70 3.9 130 160 180 670 37 330 18 0.56 7.4 Effective area Cv factor 7.2 8.9 10 0.41 0.19 0.25 0.35 0.55 AC Weight (kg) (1) 0.75 1.5 2 4 Hysteresis (2) 2.5%F.S. 1%F.S. 1%F.S. 3%F.S. 1.5%F.S. 1%F.S. 5%F.S. 2%F.S. 2%F.S.

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

e

M1 M2 M3 m1 m2 m3 E-MY2C 16 25 16 25 16 25 5 18 16 14 4 3.5 13 35 35 30 14 10 LJ1 LJ1 7 15 13 13 6 7 E-MY2H 28 32 30 30 26 26 LG1 LG1 46 20 18 18 55 46 E-MY2HT 100 38 35 35 120 100 Maximum Load Mass LTF LTF The above values are the maximum allowable values for moment and load mass.

VQ4000

44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner D side mounting D

JXCx-OMT0023

5 -16 5.7 Parameter mode 5 -18 5.7.1 Parameter mode transition 5 -18 5.7.2 Operation example 5 -19 5.8 External I/O signal display 5 -21 5.9 Output signal (DO) forced output 5 -24 5.10 Test operation mode 5 -25 5.10.1 Mode change . 5 -25 5.10.2 Jog operation . 5 -26 5.10.3 Positioning operation . 5 -27 5.10.4 Motor-less operation . 5 -29 5.10.5 Forced tough drive operation . 5 -30

MY2

5@8 @7 %5!

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

MQQ

Air filter (5 m or less) 6 (Standard only) 10 16 20 25 MQML Standard type 6: 0.02 to 0.7 0.5 to 1000 10 to 25: 0.005 to 0.7 When using a solenoid valve, use a metal seal type (Series VQ/VQZ/SQ, etc.). 5 to 3000 MQMLH 0.01 to 0.7 High speed/frequency 10-5-2 10-5-3 3 Series MQQ/MQM 10-5-4 4 Series MQQ/MQM Specific Product Precautions 1 Be sure to read before handling.

MQQ

Air filter (5 m or less) 6 (Standard only) 10 16 20 25 MQML Standard type 6: 0.02 to 0.7 0.5 to 1000 10 to 25: 0.005 to 0.7 When using a solenoid valve, use a metal seal type (Series VQ/VQZ/SQ, etc.). 5 to 3000 MQMLH 0.01 to 0.7 High speed/frequency 10-5-2 10-5-3 3 Series MQQ/MQM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

5 !