TABLE OF CONTENTS

Water Resistance Excellent Good up to Good up to Excellent up to 150 F. 180 F. 150 F. 210 F. Air Resistance Excellent Excellent Excellent Good (no oi) up to 180 F. up to 350 F. up to 180 F. up to 180 F. Abrasion Resistance Excellent Excellent Excellent Good Age Resistance Excellent Good Excellent Excellent Steam Resistance Fail Fail Fail Good (to 300 F.)

Speed Controller with Indicator

Current model Indicator window direction: 0 Indicator window direction: 180 The numerical indication can be checked without looking into the controller.

CL

Note) The manual unlocking cam will rotate approximately 180. Do not rotate the wrench flats section excessively. The lock of a fine lock series cylinder can be disengaged manually through the procedure described below. However, make sure to disengage the lock pneumatically before operating the cylinder.

7

Special electrical entry direction With bracket/Special electrical entry direction VXD2 to VXD2 3 A 6 D VXD2 to VXD2 3 A 6 D VXD2 to VXD2 7 E 9 G 90 Symbol Symbol Standard 180 90 180 90 90 A IN OUT Nil B IN OUT OUT IN IN OUT 180 180 180 180 270 90 270 90 B IN OUT IN OUT A C IN OUT IN OUT 270 270 270 270 1 Available for the VXD23 A to 26 D. 2 Bracket is attached as standard with the resin

High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

energy saving effect

Page 180 Air-cooled 200 V wCaster Adjuster-foot Kit . Page 180 Water-cooled 200 V HEA eElectric Conductivity Control Set . Page 181 Air-cooled 400 V IDH rBypass Piping Set . Page 181 Water-cooled 400 V Cooling Capacity. Page 170 tSnow Protection Hood . Page 182 Pump Capacity . Page 171 yParticle Filter Set . Page 183 Dimensions . Page 172 uWired remote controller .

Table of Contents

160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300 3.3 AS900-20 57,800 2 880 60,800 926 3.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

Guide Cylinder Series MGG

Allowable end load F (N) MGGL 80Stroke 2 900st (Ball bushing type) Deflection Y (mm) 800st 700st 1 600st 500st 400st 200st 300st st: Stroke (mm) 100st 0 0 20 40 60 80 100 120 140 160 180 200 220 Allowable end load F (N) MGGL 100Stroke 2 1000st (Ball bushing type) 900st Deflection Y (mm) 800st 1 700st 600st 500st 400st st: Stroke (mm) 200st 300st 100st 0 0 20 40 60 80 100 120 140 160 180

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Size M4 x 0.7 x 8 L Q'ty 1 BTBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 D-A5, A6 D-F5, J5 D-Z7, Z8 D-Y5, Y6, Y7 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 2 Set screw M4 x 0.7 x 6 L 2 BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 BS4-125, BS4-160 BS4-180, BS4-200 BS5-125, BS5-160 BS5-180, BS5-200 D-Z7, Z8 D-Y5, Y6, Y7 3 Set screw M4 x 0.7 x 8 L 2

MY1

(kg) m 200 190 180 170 l 160 (4000) (4000) 150 140 130 (3200) (3200) m l 120 Weight (m) Caution 110 MY1B100 MY1B100 m 100 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Floating Joint

200 180 200 Caution Maintenance Warning 1.

HRX-OM-Q026

Table 3-1 Weight of the product Weight kg Model Standard model Option A Option T HRSH250/300-AApprox. 280 [Standard model] + 24 None HRSH150/200-AApprox. 215 [Standard model] + 18 None HRSH100-AApprox. 180 [Standard model] + 18 None HRSH150/200/250-WApprox. 180 [Standard model] + 18 [Standard model] + 22 HRSH100-WApprox. 150 [Standard model] + 18 [Standard model] + 52 3.1 Transport HRSH Series

LG1H

Refer to pages starting with 181 for mounting. 80 180 280 60 160 260 Dimensions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Please be sure to fill in the blank referring to page 340. 180 Body Ported Series SY3000/5000/7000 60 Type Specifications Response Time Note) Based on dynamic performance test, JIS B 8375-1981.

Bore Size: 10mm, Stroke: 5mm, Auto Switch: F8B--Solid State , Gen. Purpose, 2 Wire, Vertical, Lead Wire: L (3m Lead Wire)

Bore Size: 10mm, Stroke: 15mm, Auto Switch: F8B--Solid State , Gen. Purpose, 2 Wire, Vertical, Lead Wire: L (3m Lead Wire)

Bore Size: 6mm, Stroke: 15mm, Auto Switch: F8B--Solid State , Gen. Purpose, 2 Wire, Vertical, Lead Wire: L (3m Lead Wire)

Bore Size: 6mm, Stroke: 10mm, Auto Switch: F8B--Solid State , Gen. Purpose, 2 Wire, Vertical, Lead Wire: L (3m Lead Wire)

Bore Size: 10mm, Stroke: 10mm, Auto Switch: F8B--Solid State , Gen. Purpose, 2 Wire, Vertical, Lead Wire: L (3m Lead Wire)

Magnet: D (Built-in Magnet), Mounting Direction: B (Lateral Mounting), Bore Size: 12, Stroke: 25mm, Action: D (Double Acting), Rod End Thread: Rod End Female Thread (w/o Thread for ø4), Auto Switch: F8B--Solid State, Gen Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: L (3m)