RSH

Contents Double with spring Single Double RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS 20 32 50 63 80 RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS RSH-R20 RSH-R32 RSH-R50 RSH-R63 RSH-R80 Set of above #7 to $2. Set of above #7 to $1.

0.01

S S L L L 5.5 81 5.5 81 6 9 6 9 6 9 Setting dial ISE70 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 ZSE80 ISE80 12 12 12 Bracket ZSE ISE Plug Rc, NPT, G 1/8 SUP port 24 Pressure gauge L3 6.5 ZSP 24 36 36 PS n Stations 1 Left Right ISA2 ISA2 Stations L1 L2 L3 1 46 2 84 38 3 122 38 76 4 160 76 114 5 198 114 152 6 236 152 190 PSE 63(Max. 65) IS 34 5 17 ISG Rc, NPT, G

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Contents 32 C96Y32-PS 40 C96Y40-PS 50 C96Y50-PS 63 C96Y63-PS 80 C96Y80-PS 100 C96Y100-PS 125 C96Y125-PS Rod seal 1 pc. Piston seal 1 pc. Cylinder tube gasket 2 pcs. Grease pack (10 g) 1 pc. Aside from the standard strokes, intermediate strokes are also available in 1 mm increments and are produced upon receipt of order.

11-cq2w-e

Grease pack part no.: GR-S-010 (10 g) Air-hydro type CQ2WBH20-PS 20 25 32 40 50 63 80 100 CQ2WBH20-PS CQ2WBH25-PS CQ2WBH32-PS CQ2WBH40-PS CQ2WBH50-PS CQ2WBH63-PS CQ2WBH80-PS CQ2WBH100-PS CQ2WBH25-PS CQ2WBH32-PS CQ2WBH40-PS Set of left nos. !1, !2, !3. CQ2WBH50-PS CQ2WBH63-PS CQ2WBH80-PS CQ2WBH100-PS Seal kit includes !1, !2, !3. Order the seal kit, based on each bore size.

Compact Cylinder/Standard Type: Double Acting, Double Rod

Grease pack part no.: GR-S-010 (10 g) Air-hydro type CQ2WBH20-PS 20 25 32 40 50 63 80 100 CQ2WBH20-PS CQ2WBH25-PS CQ2WBH32-PS CQ2WBH40-PS CQ2WBH50-PS CQ2WBH63-PS CQ2WBH80-PS CQ2WBH100-PS CQ2WBH25-PS CQ2WBH32-PS CQ2WBH40-PS Set of left nos. !1, !2, !3. CQ2WBH50-PS CQ2WBH63-PS CQ2WBH80-PS CQ2WBH100-PS Seal kit includes !1, !2, !3. Order the seal kit, based on each bore size.

Slide Unit/Built-in Shock Absorber: Ball Bushing Bearing Type Series CXWL Ball Bushing Bearing Type:

Grease pack part no.: GR-S-010 (10 g) Cylinder body Piston seal 23 is a non-replaceable part, so it is not included in the seal kit. Rod seal CXWL20-PS CXWL20-PS CXWL32-PS CXWL20 CXWL32 Set of left nos. @1, @2, @4 NBR CXWL32-PS Piston gasket Cylinder tube gasket With end lock Body gasket !2 !3 !4 !

Slide Unit/Built-in Shock Absorber: Slide Bearing Type Series CXWM

Grease pack part no.: GR-S-010 (10 g) Cylinder body Piston seal 20 is a non-replaceable part, so it is not included in the seal kit. Rod seal CXWM20-PS CXWM20-PS CXWM32-PS CXWM20 CXWM32 Set of left nos. !7, !8, !9 NBR CXWM32-PS Cylinder tube gasket Piston gasket With End Lock Body gasket !2 !3 !4 !

06-cxwl-e

Grease pack part no.: GR-S-010 (10 g) Cylinder body Piston seal 23 is a non-replaceable part, so it is not included in the seal kit. Rod seal CXWL20-PS CXWL20-PS CXWL32-PS CXWL20 CXWL32 Set of left nos. @1, @2, @4 NBR CXWL32-PS Piston gasket Cylinder tube gasket With end lock Body gasket !2 !3 !4 !

06-cxwm-e

Grease pack part no.: GR-S-010 (10 g) Cylinder body Piston seal 20 is a non-replaceable part, so it is not included in the seal kit. Rod seal CXWM20-PS CXWM20-PS CXWM32-PS CXWM20 CXWM32 Set of left nos. !7, !8, !9 NBR CXWM32-PS Cylinder tube gasket Piston gasket With End Lock Body gasket !2 !3 !4 !

Compact Guide Cylinder

Contents 12 MGPK12-PS 16 MGPK16-PS 20 MGPK20-PS 25 MGPK25-PS 32 MGPK32-PS 40 MGPK40-PS 50 MGPK50-PS Set of nos. , , , The seal kit includes to . Order the seal kit based on each bore size. The seal kit does not include a grease pack. Order it separately.

MHZ2/MHZJ2

MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Kits include items 19, 20 and 21 from the table above MHZ20-PS MHZ16-PS MHZ25-PS MHZ10-PS Seal kits consist of items 19, 20 and 21 contained in one kit, and can be ordered using the seal kit number for each cylinder bore size. 3 Parallel Type/Standard Type Series MHZ2 Dimensions MHZ2-10 Scale: 90% 27 11.4 2-M3 x 0.5 thread depth 6 (mounting thread) +0.025

Air Slide Table Series MXP

Contents Bore size (mm) MXP8-PS 8 10 12 16 MXP8-PS MXP10-PS MXP12-PS MXP16-PS !4 !8 !9 NBR, stainless steel Gasket (for plug) MXP10-PS MXP12-PS MXP16-PS A set of two of !4, !8 and !9 each Piston seal NBR O-ring Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

01-mxp-e

Contents Bore size (mm) MXP8-PS 8 10 12 16 MXP8-PS MXP10-PS MXP12-PS MXP16-PS !4 !8 !9 NBR, stainless steel Gasket (for plug) MXP10-PS MXP12-PS MXP16-PS A set of two of !4, !8 and !9 each Piston seal NBR O-ring Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

MY1

MY1M50-PS MY1M40-PS MY1M20-PS MY1M25-PS MY1M32-PS MY1M16-PS 16 17 19 Note) Two kinds of dust seal bands are available.

Parallel Type Air Gripper

MHZ16-PS MHZ20-PS MHZ25-PS 20,21,22 Seal kit MHZ2-S MHZ10S-PS MHZ16S-PS MHZ20S-PS MHZ25S-PS 20,21,22 MHZ2-(N) MHZ-AA1002(N) MHZ-AA1602(N) MHZ-AA2002(N) MHZ-AA2502(N) MHZ2-(N)1 MHZ-AA1002(N)-1 MHZ-AA1602(N)-1 MHZ-AA2002(N)-1 MHZ-AA2502(N)-1 Finger assembly 4,5,6,13 Mounting screw MHZ2-(N)2 MHZ-AA1002(N)-2 MHZ-AA1602(N)-2 MHZ-AA2002(N)-2 MHZ-AA2502(N)-2 MHZ2-3 MHZ-AA1002-3 MHZ-AA1602-3 MHZ-AA2002

MHx-OMU0057

010(10g) O C 15 - 32,40 1C 2 3 4.Assy :GR-S-010(10g) C 32 3 40 4 32 2 40 2.5 Assy 16 - 3-5./ 1025 / / / / 1 12 13 2 10,16; 20;25; 14 20,25; 3 15 C 4 5 16 A 6 17 A 18 NO 7 19 NC 8 20 NBR 9 21 NBR 10 22 NBR 11 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-D MHZ2-C MHZ10-PS MHZ16-PS MHZ20-PS MHZ25-PS 20,21,22 MHZ2-S MHZ10S-PS MHZ16S-PS MHZ20S-PS MHZ25S-PS 20,21,22 MHZ2-(N) MHZ-AA1002

CUJ

Bore size Contents 7 Piano wire Return spring CUJB4-S-PS 4 8 Sintered metal BC Bronze element CUJB6-S-PS 6 Above number 11 and an exclusive grease pack. 9 Magnet CUJB8-S-PS 8 10 Nickel plated Steel Rod end nut CUJB10-S-PS 10 11 NBR Piston seal 12 NBR Rod seal 13 NBR Tube gasket 5 Mini Free-mount Cylinder Series CUJ Dimensions for 4 Double Acting/Single Acting Without magnet/CUJB4 Note) The

MK

50 MK-50-PS 63 MK-63-PS Bore size (mm) Part no.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

MHK2

MHK-A2501 P3318403 P3318404 MHK20-PS MHK-A2001 P3318303 P3318304 MHK16-PS MHK-A1601 P3318203 P3318204 MHK12-PS MHK-A1201 P3318103 P3318104 wyu !