MGP

4.95 5.99 6.85 7.70 8.55 50 MGPM50 3.36 4.00 4.73 5.37 6.01 6.65 7.29 7.93 9.54 10.8 12.1 13.4 63 MGPM63 4.18 4.94 5.78 6.54 7.29 8.05 8.80 9.56 11.4 12.9 14.4 15.9 80 MGPM80 6.49 7.43 8.67 9.61 10.5 11.5 12.4 13.4 15.8 17.7 19.5 21.4 100 MGPM100 10.5 11.9 13.6 14.9 16.3 17.6 18.9 20.2 23.6 26.2 28.9 31.5 (kg) MGPL12100/MGPA12100( (mm) (mm) 10 20 25 30 40 50 75 100 125 150 175 200 250 300

Series CE1

100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

400, 450, 500 CA2 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper -XC5 Heat resistant cylinder (10 to 110C) -XC6 Made of stainless steel*3 *4 Up to 2700 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XC7 Tie-rod

Air Slide Table Series MXJ

400 500 600 700 0.4 MXJ8 0.3 0.5 0.35 Rubber stopper 0.4 0.30 0.2 Load mass W kg Metal stopper 0.25 0.3 0.20 0.15 0.2 100 50 200 300 0.1 100 50 200 300 400 500 Average speed Va mm/s 0.10 500 700 Average speed Va mm/s Collision speed V mm/s 0.05 400 600 0.00 200 100 300 400 500 600 0 Collision speed V mm/s (Average speed x 1.4) 700 Table (2) Max.

Parallel Style Air Gripper Series MHZ

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

MWB

, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW Double clevis The manufacturing of intermediate strokes is possible.

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

CS1 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 CS2 50 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Symbol Specifications -XA 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Change of rod end shape -XB5 Oversized rod cylinder 80

3 Position Cylinder Series RZQ

3 Position Cylinder 2-stage stroke enabled with a small increase in length Provides intermediate stop mechanism Overall length of cylinder tube RZQ First-stage stroke Additional cylinder tube length Full stroke CDQ2 Overall length of cylinder tube Series RZQ 32, 40, 50, 63 Comparison of cylinder tube overall length (mm) Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) CG1BN150

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional cylinder tube length Full stroke RHC CDQ2 MK(2) RS Q G Overall length of cylinder tube RS H A Comparison of cylinder tube overall length (mm) RZQ Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) MI W S CG1BN150+150-XC11 Dual stroke

MXU

Note 3) ( ) in column W is the dimensions of D-A93.

Free Mount Cylinder for Vacuum Series ZCUK

Note 4) Figures in ( ) in the table W are D-A93. (mm) Operation Range 20 Bore size Auto switch model 10 6 16 9 25 12.5 32 14 D-A9, A9V D-M9, M9V D-M9W, M9WV 11 7 4 5 7 7 Since this is the average value at a normal temperature including hysteresis (tolerance 30%), it is not guaranteed.

ZCUK

Note 4) Figures in ( ) in the table W are D-A93.

MXU

Note 3) ( ) in column W is the dimensions of D-A93.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

: 0.5 mNil (Example) A93 3 m L (Example) A93L PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list. 778 MXS 1322Air Slide Table Specifications 6 8 12 16 20 25 Bore size (mm) Air Fluid Double acting Action 0.15 to 0.7 MPa Operating pressure 1.05 MPa Proof pressure 10 to 60C (No freezing) Ambient and fluid temperature 50 to 300 mm/s Piston speed Rubber bumper

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

S 8 50, 100, 150, 200, 250, 300 "n" pcs. n 12 50, 100, 150, 200, 250, 300, 350, 400 Auto switch type Adjuster option Nil Without auto switch (Built-in magnet) Nil Rubber stopper B Shock absorber Metal stopper C One side centralized piping, switch rail Only for MXY12 One side centralized piping, with switch rail Nil Without one side centralized piping, without switch rail N The auto switch

SMC Pneumatic Clean Series

Applicable models D-A73, A73H, A73C, C73, C73C, E73A, Z73, R73 D-97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) However, when using a 2 color indication auto switch (DA79W, A59W, B59W), be aware that the switch will constantly remain ON if the connections are reversed.

Slit Valve XGT Series

For 200 mm wafer For 300 mm wafer 529

Pin Clamp Cylinder Series CKQ/CLKQ

Indicator light Lead wire Flexible fluorine resin heavy-duty cable, 6, 0.5mm2, 2 cores, 300 mm Impact resistance Switch part : 1000 m/s2, Connector part : 300 m/s2 Insulation resistance 50 M or more at 500 VDC (between lead wire and case) Withstand voltage 1000 VAC for 1 minute (between lead wire and case) Ambient temperature 10 to 60C Enclosure IEC529 standard IP67, JIS 0920 Watertight

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

circuit 3-wire (PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indicator) With diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93

Round Type Hydraulic Cylinder

CHQ CHK CHN Mounting correctly Mounting incorrectly CHM CHM CHS Solid state D-M9N, M9P, M9B, M9NV, M9PV, M9BV D-M9NW, M9PW, M9BW, M9NWV, M9PWV, M9BWV D-M9NA, M9PA, M9BA, M9NAV, M9PAV, M9BAV Reed D-A90, A93, A96, A90V, A93V, A96V CH2 Aporox. 10 to 15 CHA Figure 1.