Magnetically Coupled Rodless Cylinder

E' Section E-E' CYV32 No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

25 19 42.5 36 3/4" LVA M 25 1 49 8 69.5 39.5 18 36 36 44.5 46 1" LVH Class 6 LVD Inch sizes (E) shows the approximate dimension of the inserted tubing from the end of the nut.

Electric Actuator/Slider Type

5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRQ2 Angle adjusting screw Angle adjusting screw Angle adjusting screw MSQ MRQ 0 A R R 9 n Dot ot gl e A e n at at v n io a o gl io io ct dj o e re u n n gr a st di dj ra ra in y g u g 20in n n e st di st g k g in re u e e g of dj ct a di of of io e re e n gl ct n g k A k io n e e n ra y y gr n gr io o o at o o ot v v R e e 9 9 0 0 The rotation range under the adjustment of an angle at 60

e

E-MY2H E-MY2HT 25 25 9 4.4 8.4 D-m D-m E-MY E-MY Auto Switch Mounting When mounting the auto switches, they should be inserted into the actuators auto switches mounting groove from the direction shown in the drawing on the right.

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

V100

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

CL

3.1-15 MGP MGQ Series CLG1 25 to 200 20 Double acting Single rod 25 MGG Both directions 25 to 300 3.1-25 32 MGC 40 MGF Series CLA 40 25 to 500 Single rod 50 63 CY1 Both directions Double acting 3.1-33 3.1-43 25 to 600 Double rod 80 100 MY1 25 to 700 Lock-up cylinder Series CL1 40 25 to 500 50, 63 25 to 600 One direction Double acting Single rod 3.1-49 25 to 700 80, 100 125, 140 160 Up to

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction. 11-7-42 Angle adjusting screw Angle adjusting screw 0 A R R 9 n ot ot gl e e n at at v io a o io io ct dj o re u n n gr st di ra ra in y g g in n n e di st g k g re u e e of dj ct a of of io e e n gl n g k A k n e e ra y y gr n gr io o o at o o ot v v R e e 9 9 0 44 Series CRA1

Table of Contents

1 e + !

Compact 5-Port Solenoid Valve

Specification External pilot (SUP/EXH block assembly) q e r t w y u i o 10 Side ported q Series e Connector type w Type F: D-sub connector FW: D-sub connector1 FC: D-sub connector2 1 JSY1000 3 JSY3000 5 JSY5000 (25 pins) (25 pins) (25 pins) Connector Compact type entry direction adjustable r Connector entry direction * The connector entry direction for connector types

Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

JIS Standard Hydraulic Cylinder

14 43 35 1/2 52 163 15 25 to 1500 80 17 20 80 65 110 80 17 40 22 M16 x 1.5 16 44 44 3/4 65 184 18 25 to 1800 1/4 stroke 100 19 15 100 80 135 102 19 42 22 M18 x 1.5 18 44 44 3/4 75 192 20 25 to 1800 Rod series (mm) B-series rod C-series rod Bore size (mm) MM A MA D E K G H ZZ MM A MA D E K G H ZZ 32 34 M16 x 1.5 25 22 18 7 14 55 207 0.025 0.064 40 40 36 M20 x 1.5 30 27 22.4 9 19

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25 mm interval.

Basic type / Direct mount type Series CY3B/CY3R

9 #4 #8 E @4 r @7 @5 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

MGP

200st 75st 200st 24 28 34 54 70 78 25 30 38 M5 X 0.8 10 12 12 44 44 44 62 81 91 5 17 17 110 120 120 200 200 46 54 64 27 39 39 56 72 82 60 77 77 117 117 38 44 50 25, 50, 75, 100 3 3 4 16 20 25 3.5 3.5 4.5 M6 X 1.0 25, 50, 75, 100, 125, 150, 175, 200 M6 X 1.0 MGPM (Slide Bearing)/Dimensions A, DB, E MGPL (Ball Bushing Bearing)/Dimensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 25st 125st

AC Servo Motor Driver (Network card type ）

642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 7 7.

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

ISO Cylinder

air cushion is 25 mm.