0. N1 N3 N7 N9 N11 NM Note 1) M5 01 02 Symbol Nil N T F Rc 1/8" 5/32" 1/4" 5/16" 3/8" Mixed M5 thread 1/8 thread 1/4 thread NPT P P P P P VQZ100 NPTF Cylinder port P P P P P VQZ200 G P P P P P VQZ300 Note 1) Except VQZ100, mixing one-touch fittings and thread types is impossible. Note 2) Metric size one-touch fittings (Cl) are also available.
pulse multiplying factor denominator) PB09 VG2 Speed loop gain P, S PB10 VIC Speed integral compensation P, S PA08 ATU Auto tuning mode P, S PB11 VDC Speed differential compensation P, S PA09 RSP Auto tuning response P, S PB12 OVA Overshoot amount compensation P PA10 INP In-position range P PB13 NH1 Machine resonance suppression filter 1 P, S PB14 NHQ1 Notch shape selection 1 P, S PA11 TLP
P #Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line Tank P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.
up to 700 25 1500 250 up to 700 Made to Order (Refer to page 1882 for details.) 32 1500 250 up to 1000 40 1500 250 up to 1000 Symbol Specification Made of stainless steel XC6 50 1500 250 up to 1200 63 1500 250 up to 1200 80 1500 250 up to 1400 100 1500 250 up to 1500 Note 1) Strokes shorter than the recommended minimum stroke (1 to 249 st) can be manufactured, but cushion capability may
rate (l/min) Flow rate (l/min) Filtration Characteristics P Fluid: Potable water P Flow rate: 20 l/min P Liquid temperature: Room temperature P Test dust: AC course P Test method: Per SMC test method 5 m FN11lll-10-S005 FN41l2l-20-S005 20 m FN11lll-10-S020 FN41l2l-20-S020 100 100 80 80 Filtration efficiency (%) Filtration efficiency (%) 60 60 40 40 20 20 0 0 10 5 20 50 75 25 20 35 65 90
sides of 1(P) port and exhaust air from both sides of 3 and 5(R) port.
Basic Compact LEHZ25 LEHZ25L 250 250 200 200 Overhang H [mm] Overhang H [mm] 70%, 40% 150 150 40% Pushing force 100% Pushing force 100% 100 100 70% 50 50 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Gripping point L [mm] Gripping point L [mm] LEHZ32 250 200 Overhang H [mm] 150 40% 100 Pushing force 100% 70% 50 0 0 50 100 150 200 250 Gripping point L [mm] LEHZ40 250 200 Overhang H [mm] 150
With manually operated handle Proximity switch T TURCK P P&F W None * Switch cassette viewed from the front.
/See 1.2 Specifications on p.5 Review the content of the step data. 4) The pushing operation is performed at the Positioning operation position 5) The cable is not connected Confirm that the cable is connected or has been disconnected. correctly. /See 2.1 Wiring /cables on p.8 26 - No.
sides of 1(P) port and exhaust air from both sides of 3 and 5(R) port.
P-D P P C C G3 D (2) G4 5m 5m (1) 1.
P: P: PF3W540S [] P: -39No.PF-OMN0009CN-F () (PF3W504/520/540) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5
40 214 238 35 17 62 236 260 50 241 (250) 269 (278) 35 17 70 261 (270) 289 (298) Note) ( ): Denotes the dimensions for long stroke.
With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6
mounting range GB A F K BN Rc(PT) P TB AL 2-TDe8 (pin O.D.)
x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M22 x 2.5 M24 x 3 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.