Brake mechanism added

55 75 80 90 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 35 (n 2) (n = 2, 3, 4, ) (Different surfaces) D-A44C n 75 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 55 + 50 (n 2) (n = 2, 3, 4, ) (Same surface) 1 10 75 80 90 2 (Different

C95

115 135 165 45 60 70 80 20 20 25 25 245 280 300 330 16 18 22 26 25 30 30 40 Max. 157 Min. 30 275 315 335 375 130 170 170 200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250

JIS Standard Hydraulic Cylinder

As a guide, turn 90 from the position where it comes to feel tight.

Rotary Table/Rack & Pinion Style Series MSQ

Rotation 90 Rotation 90 Rotation 278 Rotary Table/Rack & Pinion Style Series MSQ Construction CRB2 CRBU2 CRB1 MSU CRJ o i t !

C95

115 135 165 45 60 70 80 20 20 25 25 245 280 300 330 16 18 22 26 25 30 30 40 Max. 157 Min. 30 275 315 335 375 130 170 170 200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 199 242 257 289 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 125 160 200 250

High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

CLS

As a guide, it should be turned about 90 past the point at which tightening can be felt. 9-9-23

Step Motor Controller

or less (No condensation) 14 to 140F (10 to 60C) (No freezing) 90 or less (No condensation) Between the housing (radiation fin) and SG terminal 50 (500 VDC) 0.29 lbs (130 g) Note 1) Do not use the power supply of inrush current prevention type for the controller input power supply.

Hydraulic Filters

90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685

CS1

14 36 43 29 32 25 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 50 47 75 15 31 161 128 M14 X .5 36 90 43 14 16 32 17 59 35 36 28 to 1000 3/4 M36 X 1.5 56 53 80 36 18.5 17 182 144 M16 X 1.5 20 40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube M45 X 1.5 60 63 90 115 18.5 46 20 226 182 M20 X 1.5

CV/MVGQ

D-G59F D-G5NTL Same side 90 + 50 (n 4) 2 (n 2) 2 15 + 50 n = 2, 4, 6, 8 (n 4) 2 110 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 n = 4, 8, 12, 16 n = 4, 8, 12, 16 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8, Different sides MQQ M n Same side RHC 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides MK(2) 2

Cylinder with Lock

1 10 90 100 110 Different surfaces Same surface 20 75 90 100 110 2 Different surfaces 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) (n = 2, 4, 6, 8, ) 20 + 50 (n 2) 2 90 + 50 (n 4) 2 D-B59W (n = 4, 8, 12, 16, ) n 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Same surface

Electric Grippers

Compact Basic LEHZJ10L, LEHZJ16L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force/Trigger level [%] Pushing force/Trigger level [%] Pushing force and trigger level range Pushing force and trigger level range Pushing speed [mm/sec] Pushing speed [mm/sec] LEHZJ20L, LEHZJ25L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

"n" pcs. 90 Same side 120 75 (n 4) 2 (n 4) 2 (n 2) 2 120 + 50 15 + 50 90 + 50 Different sides n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 6, 8 D-B5, D-B6 (n 2) 2 (n 2) 2 90 + 50 120 + 50 75 + 50 (n 2) Same side n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 90 1 pc. 120 10 120 Different sides 20 90 2 pcs. "n" pcs.

Modular Design with Uniform Body Style

80 AC50-D/AC60-D Model E F G H Applicable size VHS20-D 28 42 17.5 40 AC20-D VHS30-D 38 53 20 53 AC30-D VHS40-D 52 71 29 70 AC40-D VHS40-06-D 52 71 29 70 AC40-06-D VHS50-D 72 90 33 90 AC50-D/AC60-D Caution on Mounting Use an air filter on the inlet side for operating protection.

CHKD/CHKG

95 100 105 110 115 120 125 150 175 200 225 250 85 90 95 100 105 110 115 120 125 130 155 180 205 230 255 100 105 110 115 120 125 130 135 140 145 170 195 220 245 270 120 125 130 135 140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Tightening torque (Nm) 0.8 to 1.2 Hexagon socket head cap screw 11-6-4 5 Mini-rotary Actuator Rack & Pinion Style Series CRJ How to Order CRB2 Rotating angle CRBU2 90 100 180 190 90 100 180 190 CRB1 MSU CRJ B 05 90 E M9B S Basic type CRJ CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

to 0.5 Basic type CRJB1 0.40 1 With external stopper CRJU1 2.0 Weight Weight (g) Note) Type Model CRJB05-90 32 CRJB05-100 05 CRJB05-180 39 CRJB05-190 Basic type CRJB1-90 54 CRJB1-100 1 CRJB1-180 67 CRJB1-190 CRJU05-90 47 05 CRJU05-180 53 With external stopper CRJU1-90 70 1 CRJU1-180 81 Note) Values above do not include auto switch weights. 11-6-6 7 Mini-rotary Actuator Series CRJ Rotating

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 7 5 5 5 3 7.5 5 3 5 3 90 90 5 90 5 A MHZ 20 20 20 20 (3 x SA) 20 20 MHF Section SD SD MHL MHSJ3-63D MHSJ3-80D MHR MHK 4 MHS 10 4 11 MHC 3 5 3 5 90 90 MHT 5 MHY 20 20 20 20 MHW -X (mm) L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5

Dual Rod Cylinder Series CXSJ/CXS

, 100 80 25 20 15 100 10 30 35 40 45 50 60 70 75 80 90 40 35 30 25 20 15 100 10 45 50 60 70 75 80 90 Model CXS10 CXS15 CXSJ 30 40 50 97 92 87 82 102 107 112 117 122 132 142 147 95 90 85 80 75 70 65 100 105 115 125 130 55 45 25 35 45 99 94 89 109 114 119 124 129 139 149 154 104 159 169 179 95 90 85 80 75 70 105 110 120 130 135 100 140 150 160 CXS D-X Individual -X 567 Series CXS Dimensions