ZPT/ZPX

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 10 40 40 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT100HB-A16 ZPT100HB-B12 M12 x 1.75 100 103 68.5 107 47.5 60.5 90.5 35.5 100 103.1 68.6 106.7 47.5 60.5 35.5 ZPT125HB-A16

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

B' B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Drain guide R, NPT, G Operating Pressure: 0.5 (MPa) Operating pressure: 0.5 (MPa) Mounting bracket Port size Model E M3 x 0.5 Depth 8 Drain piping D C B A F G H J K B' 3 8 AMC310 75 140.5 138.5 150.5

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

ZPT/ZPX

across flats 21 Hexagon width across flats 21 Width across flats 37 Width across flats 24 4 A B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 34 (mm) (mm) C M8 x 1.25 40 ZPX40H-B01-B10 42 M10 x 1.5 Model A 40 ZPX40H-B01-B8 B 42 A B C D E F Y G 63 65 14.5 26 41

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.

RB/RBL/RBQ

Cap Cap bracket RE A B REC CX CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Model Basic type With cap With cap Basic type dimensions Hexagon nut RHC a 6 7 H 2.7 2.7 F D M10 x 1.0 M10 x 1.0 E1 3 3 E2 L LL S E3 LL Z B C h MM RBL1006 RBL1007 RBLC1006

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 38 55 MXY8 2.5

Dedicated Controller

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

MLU

Please contact SMC for more information. 9-13-6 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9-13-7 7 Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order B 25 30 D F MLU Without auto switch With auto switch B 25 30 D F J79W S MDLU Number of auto switches

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Applicable bore (mm) A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 9-14-9 10 Series ML1C Construction Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

CQM

W 12 CUJ A B W CU 16/20/25 CQS CQM W A B CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ Hs 32/40/50 MU D(mm) -X D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type. 20Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

C B A stroke A C 3) 2nd stage: B-A stroke operation Following the 1st stage, when the air pressure is supplied from the C port, the rod operates the B-A stroke. B B-A stroke B A C 4) Cylinder retraction When the air pressure is supplied from the B port, the rod retracts completely. B stroke A stroke A stroke or B stroke operation can be made individually.

JA/JAH/JB/JS

A R Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4

ITV

Count AF Supply pressure: 1.0 MPa Pressure Characteristics Flow Characteristics Set pressure: 0.45 MPa AR 1000 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 900 kPa 900 Output deviation factor (% F .S.) 800 kPa IR 800 0.5 700 kPa Set pressure (kPa) 700 600 kPa

VP4

VFR VP450 VP470 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 82 (3 position: 98.5) 129 VZS 71(95.5) VFS 139.5 B A B A VS4 VQ7 (External pilot port) 1/8 (External pilot port) 1/8 EVS VFN A B B A B B B A EA P EB P EA EB ( ): Port size 3/4, 1 Dimensions: Port

Made to Order

Double clevis type Lock location Port (A) (A) (A) (A) (A) (A) (A) (B) (D) (B) (D) (B) (B) (D) (D) (B) (B) (B) (D) (D) (D) CLS (C) (C) (C) (C) (C) (C) (C) Cushion valve 1.

SFOD-OMT0009CN

17 9 () 1.2 LEFS LEFS16 LEFS25 A B H A B [mm] 10 5 20 12 6 [mm] 500 500 500 600 700 800 600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108