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1 0 lo 1 00 Double rcd o12,o16/5llj30 o20 to o40l5 to 50 o50, 06311 0 to 50 Standaid Double acting Slngle rcd o12. 01615 to 30 o2Oa /5lo50 o32. s4015 lo lOO o50 to o 100/10 to 100 Double rod o i 2 , o 1 6 1 5 t o 3 0 a2O, o25l5Io 50 a32,64015lo lOO o50 to 010C/10to 100 Singleacting Sp ng retum/extend o 1 2 I o s 4 \ l 5 , 1 Q aslt1O.20 @eooy options @Auto switcn See catal N320 for avaibble

RS2H-OM0045P

(mm) 50 63 80 / 1.5MPa 1.0MPa -1060() () 1.4 0 (Rc,NPT,G) 1/8 1/4 1/4 1-2. (N) 50 63 80 40.3 78.5 88.2 139.5 174.6 217.3 1-3. (mm) 50 30 63 30 80 40 1-4. (mm) (Kg) 50 1.70 / 63 2.78 80 4.96 4 - RS1H 1. mA 2. V(m/min) (Kg) 3.

MHF2

L L H Holding point Holding point H MHF2-12D MHF2-8D 80 50 Pressure 0.2MPa 40 60 0.5MPa 0.5MPa Pressure 0.2MPa 0.6MPa 0.6MPa Overhang Hmm Overhang Hmm 0.7MPa 30 0.7MPa 0.3MPa 0.3MPa 40 0.4MPa 0.4MPa 20 20 10 40 20 80 60 40 20 0 0 50 30 10 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 100 0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang

MHF2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments.

Air cylinder

. -10 to +60oC with built-in magnet (No freezing) Ambient and fluid temperature Lubrication Not required (non-lube) Stroke length tolerance to 1000st +1.4 mm t0 1500st +1.4 mm 0 0 Cushion Rubber bumper/ Air cushion Piston speed 20 to 63 50 to 1000mm/sec 80100 50 to 700mm/sec Action Double acting Use the actuator with allowable kinetic energy or less. (Refer to 2-6.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

MONOSASHI-KUN

50 mm R Front cushion 63 63 mm H Rear cushion Standard cylinder stroke(mm) Standard cylinder stroke Bore size Stroke 25 50 75 100 125 150 175 200 250 300 400 500 2-2-2 Applicable Auto-Switch Models Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV M9NWV

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

18 32 50 10 29 40.5 M8 x 1.25 9.5 depth 9 22 22 23 20 8 748

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Indicator Without indicator Symbol Nil A F G J K L M Rear flange surface Actuator port direction Flange side Flange side Left flange surface Rear flange surface Right flange surface

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) W 4 A 15.5 W 5.5 A 11.5 12 16 20 25 0.5 4.5 0 4.5 16 4 6 12 3.5 1 20 7.5 2.5 16 5.5 -1 21 9.5 0.5 17 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Cylinder with Turntable ø63, ø80, ø100 Series MGT

Cylinder with Turntable 63, 80, 100 Series MGT How to Order M 63 50 11 M9BW 4 M9BW Cylinder with Turntable MGT Cylinder unit/ Number of auto switches Table unit/ Number of auto switches Guide rod bearing type 2 pcs. Nil Cylinder unit/ Auto switch S 1 pc. M Slide bearing S 1 pc. 2 2 pcs. L Ball bushing bearing 3 3 pcs.

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

Bore size 32 to 63 M9BW MHS2 D 50 Made to Order Refer to page 545 for details. 2 fingers Number of fingers 2 Number of auto switches Nil S 2 pcs. 1 pc. Action Bore size Double acting D 32 40 50 63 32 mm 40 mm 50 mm 63 mm Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

Mounting: B (Direct Mount Rod Side Tapped), Bore Size: 12mm equiv., Stroke: 100mm, Connector: w/Connector, Sensor Cable Length: L (3m)

Mounting: B (Direct Mount Rod Side Tapped), Bore Size: 12mm equiv., Stroke: 100mm, Connector: Z (w/o Connector), Sensor Cable Length: L (3m)

Mounting: B (Direct Mount Rod Side Tapped), Bore Size: 12mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: L (3m)

Mounting: B (Direct Mount Rod Side Tapped), Bore Size: 12mm equiv., Stroke: 50mm, Connector: Z (w/o Connector)

Mounting: B (Direct Mount Rod Side Tapped), Bore Size: 12mm equiv., Stroke: 50mm, Connector: Z (w/o Connector), Sensor Cable Length: L (3m)