Mechanically Jointed Rodless Cylinders Refer to front matter 6 for details. 22 Mechanically Jointed Rodless Cylinders Series MY3M Side Support Side support A MY-SA 2 x G E F 2 x H B A D C Side support B MY-SB 2 x J E B A C D (mm) B C 15 25 35 G 6.5 8 9.5 H 3.4 4.5 5.5 J M4 x 0.7 M5 x 0.8 M6 x 1 D 26 38 50 E 4.9 6.4 8 F 3 4 5 A 53 65 77 97 112 138 160 Model Applicable cylinder MY3A16MY3B16 MY3A20MY3B20 MY3A25MY3B25 MY3A32MY3B32
/300 Manifold Connector Kit Plug Lead Unit [Option] VQZ100 / How to Order Manifold C D Series VV3QZ 1 2 08 CE compliant CE marked Nil Q 1 VQZ100 Manifold type 2 Body ported Option None DIN rail mounting (With standard DIN rail length) DIN rail mounting (Without DIN rail) External pilot type Nil D D0 Note 1) R Note 2) Stations 02 20 2 stations 20 stations Note 1) Order DIN rail separately
C c OFF OFF OFF ON OFF D d OFF OFF OFF OFF ON Power off Turn on the power E E OFF OFF OFF OFF OFF again When multiple alarms in alarm groups A to D occur, the relevant OUT 0 to 3 will be ON.
Manual override 10 Clean series Nil B C D Non-locking push type (Tool required) Locking type (Tool required) Locking type (Manual) Slide locking type (Manual) Copper/Fluorine/Silicone free + Low particle generation Write sequentially from the 1st station on the D-side.
Manual override 10 Clean series Nil B C D Non-locking push type (Tool required) Locking type (Tool required) Locking type (Manual) Slide locking type (Manual) Copper/Fluorine/Silicone free + Low particle generation Write sequentially from the 1st station on the D-side.
(Factory-wired) P C D Regenerative option When using regenerative option, disconnect P( ) and D, and connect regenerative option to P and C. Refer to section 11.2 to 11.5. Supply the following power to L11 L21.
Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6
Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
373 287.5 300 312.5 337.5 350 362.5 267 283 299 315 331 347 (Rail mounting hole pitch 12.5) 15.5 13.5 12 16.5 14.5 13 DIN rail holding screw Triangle mark position 1-6-109 Exploded View: DIN Rail Manifold Type 45F (D-sub connector type) Manifold (c) DIN rail release button U side Position for increasing stations (a) Bolt (b) Block separation (c) DIN rail release button lever Lid D side Replacement
121.5 110.5 95.5 80.5 Operating range Note) Operating range Note) 8 8 8 5.5 5 5 5 5.5 11.5 11.5 12 12 12 Operating range Note) Perpendicular electrical entry is not available for 50 and 63. ( ) D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV MY1CW25/32/40/50/63 B A Reed Switch Solid State Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y59 , D-Y69 , D-Y7P(
Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length(L)[m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal
Applicable bore size (mm) B1 C D d H1 Applicable bore size (mm) Part No.
depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.
6.75 9 10.5 Floating joint: Series JA In the case of dimension without C M M U U D F G B B E H C E P A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
RESET B 8.3 P.41 RESET C OFF I/O STOP OFF OFF 8.5 ONP.44 RESET C D RESET C RESET D 66 No.JXC-OMU0004-A (M24V) RESET D RESET D 3.4 P.14 (C24V) RESET D RESET D ( E ) 67 No.JXC-OMU0004-A E ON E BK RLS E EEPROM EEPROM E 10 CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.
32 to 100 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 7-6-22 23 Compact Cylinder with Auto Switch: Standard Type Double Acting, Single Rod Series CDQ2 Operating Range 180 200 Bore size (mm) Auto switch model 12 125 140 160 63 80 100 16 50 20 25 32 40 D-A7(H)(C) D-A80(H)(C) D-A9(V) D-Z7 D-Z80 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V)L D-F7NTL D-F79F D-F9(V) D-F9W(V) D-F9BA(V)L D-Y59 D-Y69 D-Y7P
) Applicable tubing model: T0806 D side U side DIN rail DIN rail holding screw Manual override (Non-locking) Applicable connector D-SUB { } JIS-X-5101 MIL-C-24308 Terminal no. 1 (Rail mounting hole pitch 12.5) D side connector (Station n)(Station 1) (mm) 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 9 223 212.5 200 11.5 10 248 237.5 216 16 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120