Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 32mm, Port Thread: Rc, Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: V (Single Knuckle Joint), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: MBPC (1.0m

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: V (Single Knuckle Joint), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: MDPC (1.0m

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 300mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: V (Single Knuckle Joint), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: Z (5m)

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Leadwire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: Rc, Auto

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: Single Knuckle Joint, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: 1.0m Cord Length, M8-4

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: Single Knuckle Joint, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: 1.0m Cord Length, M12-4

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 32mm, Port Thread: Rc, Stroke: 300mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: Single Knuckle Joint, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: 5m, Number: -

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW

XL-OMY0002

25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW

High Vacuum L Type Valve

Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

XLJ- -*G1 Series 25 40

Direction of exhaust Fixed Note 1 Operating pressure Pa (abs) Atmospheric pressure to 110-2 Conductance l/s Note 2 12 45 Operating power voltage 100VAC, 200VAC,110VAC,220VAC,230VAC,240VAC,24VDC,12VDC Electrical entry Grommet Pam3/s Internal 1.3 x 10-8 Leakage at ambient temperature, excluding gas penetration External 1.3 x 10-6 at ambient temperature, excluding gas penetration Type of flange KF(NW

10

-XC26 With split pins for double clevis pin/double knuckle joint pin and flat washers*4 Ordering Example of Cylinder Assembly -XC27 Double clevis and double knuckle joint pins made of stainless steel -XC29 Double knuckle joint with spring pin -XC30 Rod trunnion -XC35 With coil scraper -XC65 Made of stainless steel (Combination of XC7 and XC68)*2 Cylinder model: MDBD32-50Z-NW-M9BW Double clevis

Cylinder with Lock

300, 350, 400, 450, 500 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW

VQ4000

for 12 Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed U D U D Input unit COM PNP (+) or with no SI unit (for SDOW) Nil Kit Serial transmission kit N NPN () Input unit Mounting SI unit Nil 0 1 2 3 4 With no SI unit, or input unit (In the case of SDOW) Without input unit With 1 input unit With 2 input units With 2 input units With 4 input units D U D side mounting U side mounting SI unit OW QW NW

Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 80, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)