V

E L E C T R I C A L E N T R Y T Y P E O F S E A L L Type plug connector with lead wire LO Type plug connector without connector 0 Metal 1 Rubber P I L O T VA LV E S P E C I F I C AT I O N S 1W (Standard) H 1.5W (High Speed response) N Negative Common M Type plug connector with lead wire MO Type plug connector without connector N o t e )Y Low wattage (0.5W) Note) Except for 100/110VAC type

AC Servo Motor Driver

(Example) Limited to 100[ms] since During acceleration: 100[ms] 20 20 100[ms] 200[ms]. 200[ms] as set since During deceleration: 200[ms] 20 5000 400[ms] 200[ms].

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V e Holder t Pad Form/Diameter Part no.

IZx-OMT0049

in height fr om ioniz er to workpiec e [ mm] Installation distance in height fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (150) (100) (50) 0 50 100 150 200 250 300 350 400 450 500 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm

Step Motor Controller

the mode SW (Close the cover after changing SW) u i e Cover o !

Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

CATALOG VC10

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

NCQ8

The load voltage is 100 VAC.

LEC-OM069xx

Posit io n e rr? ? or Posit io n e rr? ? or 3 La rg e friction Refere nc e sp ee d Refere nc e sp ee d Without friction compensation With friction compensation 5 5-62 5 Adjustments 5.8.3 Current Control Mode Selection Function This function reduces high-frequency noises while the servomotor is being stopped.

SY

(D Side Mount Type) SUP/EXH Block Assembly e Part Nos.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 8 7.

MHZ

100 150 Misc.

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

4/5 Port Solenoid Valve

Sub-plate, 40, 41, 42 manifold Port size Nil: Without sub-plate D: Push-turn locking slotted type Electrical entry (With gasket and screws) 24, 12 VDC, 6, 5, 3 VDC M8 connector 24, 12 VDC, 01: 1/8 with sub-plate Note) 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 100, 110, 200, 220 VAC DIN terminal Grommet L plug connector M plug connector E: Push-turn locking lever type D: With connector

NCG/CG1

bore size 80 and 100.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

EX120/121/122

r e r w No.