MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

JA/JAH/JB/JS

sphere R Allowable eccentricity U Weight (kg) B C D E F G H Nominal size Pitch -X Compression Tension JB12-3-050 JB16-4-070 JB20-5-080 JB25-6-100 JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 24.5 26.5 33 38 51 62.5 80.5 101 129 149 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 7 7 8 9 13 15 18 24

JA/JAH/JB/JS

of sphere ML2B C J G5-S CV MVGQ CC RB R J (mm) DMaximum operating tension and compression force (N) Applicable bore size (mm) M A Maximum thread depth P Model Center of sphere R Allowable eccentricity U Weight (kg) B C D E F G H Nominal size Pitch -X Compression Tension JB12-3-050 JB16-4-070 JB20-5-080 JB25-6-100 JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 JB160-24-300 12

Parallel Style Air Gripper Series MHZ

Axial Ported (with M5 Port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) Model A D2 B E F G H D1 M5 x 0.8 Piping port S C S C S C S C MHZ2-10 M 0.016 0.043 12f8 15 11 7 52.8 18 28.3 5.5 Plug 10 : M-3P 16 to 25: M-5P End boss assembly MHZ2-16 M 0.016 0.043 16f8 20 10 15 58.7 16.2 27.7 6.5 H G Note 1) MHZ2-20 M 0.020 0.053 20f8 22 12 19 70.5 18.2 31.2 7.5 D2 MHZ MHZ2-25 M

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

25

Connection circuit (POWER connector) 0.8-1.0 26-24 0.14-0.2 ZS-28-C Wiring of the IZS40 e-con is adopted for the connector of the IZS40. Connector with cable or without cable may be selected when placing an order for the power supply cable. When only an e-con is required, place an order for it as a part.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

24 VDC) Dimensions: Motor Parallel LEKFS32R 6.4 Motor option: With lock 6.4 (4 locations) 5H9 M6 (4 locations) 24 8 20 15 65 (63) 132.5 Cable length 250 24 Motor cable 65 (3) 15.2 (2.4) (94) (73.5) 5H9 (+0.030 +0 ) depth 8 (Depth of counterbore 3) C-C Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5

Profile Design ISO/VDMA Air Cylinder Series CP95

E+..

Series VQ Metal Seal/Rubber Seal Body Ported

Plug for cylinder port Silencer for EXH port Double check block Individual SUP/EXH DIN rail mounting SY Built-in silencer SYJ Blank plate Name plate SX VK VZ VF Except for S kit Except for L kit Except for C kit Except for C kit Except for C kit Except for C kit VFR VP7 P.1.10-26 P.1.10-21 VP4 VQ Except for S kit Except for S kit Except for S kit Except for S kit VQ4 VQZ P.1.10-66 P.1.10-

48

L B (Table traveling distance) (4) 56 C (46.5) (C) Stroke 10.4 10.4 [D] D 28 28 (48) 35.5 [Origin] Note 3) Origin Note 2) (40) 46.5 48 43.4 (115) With lock With motor cover Motor cable (2 x 5) Lock cable (3.5) 15 Cable length 300 20 113.9 Cable length 250 20 151.3 65 20 (1.1) Motor cable (2 x 5) 54 (36.3) 46.5 [mm] Model L L A B C D E Note 1) Distance within which the table can move when

Adsorption Plate

) A B C D E F G N Part no.

ZP

A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16

NAAMS Standards Compliant

: Machined A B A C B 6H6 through +0.008 0 D C E 6H6 through +0.008 0 D F 200.03 10 E G F 200.03 10 G 300.025 300.025 9 through H 300.025 300.025 I 250.05 9 through J H 250.05 I 45 M6 x 1.0 R45 500.05 M6 x 1.0 750.05 6.5 18 R25 10 3 10 1 1 6.5 R6 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg] CKZ-50A022 ACA246M 80.0 65.0 50.0 90.0 56.0 0.5 CKZ-50A023 ACA247M

CG1

C-16 type for pivot C-18 type for pivot Rod End Nut Clevis pins and knuckle pins are common for bore size 80 and 100.

ITV

Cable connector (4-wire) Straight type Cable connector (4-wire) Right angle type 50 Mounting hole 4 x 7 F.R.L. (31) AV E REGULATOR P C M S E REGULATOR P C M S AU RESET 40 52 SET AF ITV1000 ITV1000 LOCK UNLOCK AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Setting

Series AP500

C-22 VS Hastelloy C-22 H 3) Not available with SHP, SH, H materials.

CP95

, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320

CP95

, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320

MXW

Mep Mep = 1/3 We x 9.8 (L3 + C) Examine Mep.