Microspeed Cylinder

A90 A90V No Reed switch Solid state switch 2 wire 24V A93 A93V Grommet 100V 12V Yes 3 wire (NPN equiv.)

Table of Contents

7 No. q w e r t y u i o !

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Auto switch model Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Load voltage Indicator light Applicable load Perpendicular In-line Special function Type Electrical entry Wiring (Output) AC DC 100 V A90 A90V 5 V, 12 V 100 V or less IC circuit No Relay PLC 24 V Reed switch Solid state switch 2-wire A93 A93V 12 V Grommet Yes A96 A96V IC circuit 5 V 3-wire (NPN equiv.)

1

(Standard body dimensions) DE E -X -XA17 -XA21 20DA Data MM MM 30 (Standard body dimensions) 30 (Standard body dimensions) T A A E E 6-17-13 12 Simple Specials: -XC14: Change of Trunnion Bracket Mounting Position These changes are dealt with Simple Specials System.

SMC Pneumatic Clean Series

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

CJ2X/CUX/CQSX/CQ2X/CM2X

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire Reed switch Solid state switch A96V A96 5 V IC circuit Grommet (NPN equivalent) Yes Yes Relay, PLC 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV

CJ2X/CUX/CQSX/CQ2X/CM2X

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire Reed switch Solid state switch A96V A96 5 V IC circuit Grommet (NPN equivalent) Yes Yes Relay, PLC 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV

RSQ

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Compact Cylinder Series NCQ8

B 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.34 0.20 4-E 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Rear screw clearance hole / NC(D)Q8M(Z) (Inch) Symbol Bore E B 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.34 0.20 4-E 4-E 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Through screw clearance hole / NC(D)Q8N(Z) (Inch

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

-/22Double Foot Style (M) / CJ2M, CJ2M 10112122Rubber bumper View E GB F NN GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Cover surface Piping port 2 x M5 x 0.8 D LY LB LH LT LZ LX LT S + Stroke H NA A 4 x LC Mounting hole Y X X Y NB LS + Stroke Z + Stroke C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 NN M4 x 0.7 M5

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable cylinder MY3A16, MY3B16

Basic Type/Direct Mount Type

Note 3) Bore size determination E Es NG Determination of allowable stroke (W + WB) V 2 E = x ( ) 2 1000 E Es Note 2) OK Determination of pressure (P) when making intermediate stop Review of order made products based on operating conditions P Ps DNote 1) This cylinder cannot perform an intermediate stop using an air pressure circuit in vertical operation.

RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

CLQ

Bore size (mm) T1 T2 M F E D B Part no.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

3 Position Cylinder Series RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

RQ

RS M W V T2 Applicable mounting bracket Bore size (mm) Weight (g) Joint 2D through 2O counter bore T1 B E J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 100 YU-10 YA-10 YB-10 160 Bore size (mm) O M J E D B Part no.