q"s Relief flotv characledstics suppry pressurc: i .0 r pa Pressure characteiistics sei plessu:0.4 Mpa Flow characteristics supp y pGssure: 1.0 M Pa 1 0.9 0.8 d : 0 . 7 0 6 0 .s 'rt E o.+ 0 0.1 0.0 0.0" " " o 50 100 150 200 250 300 o 1 0.6 0.8 1 1.2 Supply pfessure (lvlPa) 50 100 150 200 250 Frow rale (4min (ANB)) Series lTV205n Hysteresis Linearity Repeatability 0.9 0.8 o.7 ii 0.6 3 o.s : 0.4
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 450mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A44--Reed, DC Volt >5 <24, AC Volt <200, LED, DIN, Lead Wire or Prewied Connector: -, Number: -
Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal
Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 400mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 400mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 25mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: F59--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 25mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: F59--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 400mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A59W--Reed, DC Volt >5<24, 2-color Indication, 2 Wire, Lead Wire or Prewied Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 50mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: K59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Single Clevis, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: F5PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewied Connector: -, Number: -
(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65