5 Port Solenoid Valve

B [Pressure center] D side U side Function C 4-position dual 3-port (N.C. + N.O.)

Series SV

pilot port] Applicable tubing O.D.: 4 N3 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, N1 4, N3 6, N7 L3 28.8 (L4) U side D side (C6: 3.2) (N7: 7) (4.9) 8 58.4 36.9 47.3 31.2 23.9 40.1 5.5 B B B B B 35 M3 Terminal thread A A A A A 92.2 18 83.7 28.8 A B A B 6.2 Manual override Press and turn for the locking type.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

B B B B Manual override (Non-locking) n A A A B B B A A A A 3 1 2 2 (Pitch) P = 51 1 3 6 [2] n Stations R 11/2 250 105.5 Stations 176.5 D side 209 AMC810-14 Exhaust cleaner (Option) 250 135 D side mounting 125 External pilot port U side 194 135 1/8 125 194 X PE PE 4 x 1/8 (PE port) U side mounting 81 P EB 31 50 EA 37 37 61 43 2 x 3/4 (P port) n: Stations 2 194 212 3 245 263 4 296 314 5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAL D-F7BAVL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-M9 D-M9V D-F9W D-F9WV D-A7 D-A80 D-F7V D-F7WV D-F7BAVL D-A7 D-A80 D-A9 D-A9V D-M9V D-F9WV D-A73C D-A80C Bore size (mm) D-A9V D-J79C D-F9BAL D-P5DWL D-A79W D-A79W D-P5DWL D-F9BAL A B A B A B A B A B A B A B U U U U U U U U U U 32 9.5 10 7 8.5 12.5

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

B B B B TM SZ 5.4 16.5 VP4 L1 30.5 L2 S0700 38 VQ 1 2 3 4 5 6 7 8 n Stations D side U side VQ4 VQ5 VQC 123.5 SMC SMC SMC SMC SMC VQZ 88.5 B B B B B B B B SQ 47 37.5 A A A A A A A A VFS 2 11.5 9 37.5 28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100-B04A) for the unused conduit port (G 1/2).

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

&snac

f o r a i r t u b e s i z e a n d i e n g t n s h o u l d b e 5 m a n d b e l o w ' F o r o u r s i n g a i r t u b e 5 r n a n o a D o v e ' p l e a s e d o n o t i n s t a t l v a l v e i f t u b e i s b e n d o r c o n s t f u c t e d ' l f t h e d e h u n r i d i f t l i n s p e r f 0 r m a n c e w i t t l o w e r . o f m e m b r a n e a i r d r Y e r T a b l e c 0 n d i t 4 i o n color

0.4

2 18.5 T 12 12 kit EXH outlet L Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n kit 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported S R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A kit 39.4 (58.1) 62.1 41.7 25.7 20.9 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 C kit P=17.5 63.3 44.5 7.5 One-touch fitting

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

SV

connector is mounted) 7.5 B B B B 102.9 111.4 118 100.4 91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300--.

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

ZP

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

SX

A: Orange B: Green U D Note) The dimensions L1 to L4 are identical to SS5X3-45F Station (P . 1-6-92).

Modular Design with Uniform Body Style

B AC30-D to AC60-D B B B B B B Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Barb fitting applicable tubing: T0604 1/4 1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 A B C E F G J K M N Q1 Q2 R S U V1 V2 AC20-D 1/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38

7.5

1 u !0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

VFS

VV5FS2 01F 1 U 1 06 01 Nil N Rc NPT NPTF G Symbol Plug-in type With D-sub connector Series VFS2000 Manifold Connector mounting direction T F Porting specifications A, B Passage EA, EB P U side Symbol Option 1 2 Side Bottom D side mounting U side mounting D U Port size Common Common A, B P, EA, EB Symbol 01 02 3 Side Bottom Individual Common 1 8 Rc Rc Rc M Mixed 4 Stations 1 4 1 4 Junction

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

CQ2

A B A B A B A B A B A B U U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9 6

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30