Fieldbus System

D B Manual override D side U side Push-turn locking slotted type: Press, then rotate it. ( ) L1 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B) port side : Yellow Light/surge voltage suppressor 4 x M5 mounting hole SI unit EX260 SY SV VQC S0700 14 A B A B A B A 14 A B A 14 A B A 14 A 14 A (114.8) 97.5 4.7 113.4 101 1.4 81.2 12 B 12 B 5.5 B 12 B 12 B 12 10.9 34.2 L2 1.5

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side Station No. 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-3/8, 1/2 (ports A, B ) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P=41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P=41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical entry on D side (LD) 17 107.8 D side 22 179 (single, double, 3

NCQ2/CQ2

A 32 to 200 A B U D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7 WV D-F7 V D-F7BAVL D-A7 D-A80 D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F79F 12 to 25 32 to 160 U U B A B A 32 to 100 D-P3DW A B U 188 Series (N)CQ2 High Lateral Load Water Resistant Standard Single Acting Double Rod Axial Piping End Lock Clean Series Copper/Fluorine free series Construction and Parts Auto Switch Proper Mounting

ZP3

ZP3-YJP-B ZP3-YK(15/20)-B ZP3-Y-(02/04/06) ZP3-Y-(U2/U4/U6) Vacuum inlet o o y y t t Vacuum inlet u u i y t Component Parts u No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U U U U U U U A B A B A B A B A B A B U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 12 22 26 23 26.5 20.5 19.5 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 7.5 (5.5) 16 25 29 26 29.5 23.5 22.5 20 25 32 40 50 27 31 28 31.5 25.5 24.5 5 7 8 6.5 7.5 4 30 34 31 34.5 28.5 27.5 5 7.5 8 7 7.5 4.5 34 27 38 29 26.5 35 38.5 32.5 31.5 6.5 6.5 9.5 6 9 3.5 5 12 9 11 8 8 37.5 30.5 41.5 32.5 30 38.5 42 36 35 10.5 9 13.5

Fieldbus System

U side D side B B Note) Do not enter the SI Unit part number and the end plate part number together.

Vacuum Pad

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Modular F.R.L. Units

When the set pressure is 0.15 MPa or less, the valve q may not open due to the valve spring w force. 100 AW20-B to AW60-B Series AW20K-B to AW60K-B Series Construction AW60(K)-B AW20(K)-B AW30(K)-B/AW40(K)-B w y w y q w y q q IN OUT IN OUT IN OUT u r t i u r t i r e t Drain AW20K-B to AW60K-B (Filter Regulator with Backflow Function) u Drain o i A-A A SMC K P C U O S L H o t Drain A Component

Electric Actuator/Slider Type

7 q @0 u A A i o !9 !6 !9 !1 !5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

V100

B01 M3 female screw M5 female screw Stations Station 3 2 1 D side U side 02 03 2 stations 3 stations 20 20 stations Note) Maximum of 20 stations Electrical entry 3 1 Grommet/Plug lead C 2 How to Order Valves S070 B 5 B G Body type Electrical entry G C Grommet Plug lead with light/surge voltage suppressor Body type Base mounted with screws Symbol B Power consumption Pressure specification

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

Compact Cylinder

A 32 to 200 A B U D-A7l D-A80 D-A7lH D-A80H D-F7l D-J79 D-F7lW D-J79W D-F79F 12 to 25 32 to 160 D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7lWV D-F7lV D-F7BAVL U U B A B A 32 to 100 D-P3DWl A B U 169 Series CDQ2 Compact Cylinder Standard Large Bore Size Long Stroke Non-rotating Rod Axial Piping Anti-lateral Load With End Lock Water Resistant Auto Switch With Auto Switch Made to Order

Table of Contents

The air from P portmoves to needle valve u, where its flow is adjusted, and flows to A port. The meter-in control of needle valve u slowly moves the cylinder from A to B.

MGP

Stroke (mm) Bore size (mm) Bearing 25 50 75 100 125 150 175 200 16 20 25 32 40 50 63 80 100 U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U Built-in cushion valve inside the body U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U MGPM Slide bearing MGPL Ball bushing bearing Oversized Guide Rod Series MGPS 50, 80 Improved Load Resistance Oversized Guide Rod

AC Servo Motor Driver (Pulse input type/Positioning type ）

B1 B1 Electromagnetic brake Electromagnetic brake Switch Switch lock lock 24 V DC power supply for electromagnetic brake 24 V DC power supply for electromagnetic brake or VAR VAR U B U B lock lock B2 B2 The surge absorber (VAR) must be installed between B1 and B2.

Plug-in/Plug Lead: Single Unit

pilot port) With connector on D side (FD) 2-6-12 Base Mounted Series VQ5000 Plug-in Unit Bottom ported drawing With connector on U side (FU) 106 46.8 59.2 VQC 83.5 9 9 55.5 M5 ground screw 2n-Rc 1/2 4(A), 2(B) port SQ 34.5 VQ0 n U side X 12 VQ4 B 2 A 4 6 B A VQ5 B 2 A 4 VQZ 5 SMC SMC SMC SMC SMC B A VQD B 2 A 4 4 B A P = 41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1