High Vacuum L Type Valve A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.
Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP
ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 481 b
) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight
Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy r Motor type e Motor mounting position y Stroke [mm] t Lead [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Nil In-line R Right side parallel L Left side parallel Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol
) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 3) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.34
Series CJ2 miniature cylinders available in spring return, spring extend, or double acting offer stainless steel tubing and stainless steel rods. The series is available in bore sizes 6, 10, 16mm and stroke lengths from 1/2in. to 8in.. Mounting options include basic, foot, front flange, and double rear clevis. Series CJ2 is auto switch capable Standard double acting single rod, Bore sizes
pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A
wire length L0: 600 mm L1: 1500 mm U side 3.5 163 L2: 3000 mm 44 62 73 Station number 9 9 2-Rc 1/8 (External pilot port) Electrical entry on U side (LU) 15 12 X n Manual override 2 B 4 A 8 2 B 4 A B A B A B A B A B A A A 7 SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A Indicator light 2 B 4 A 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 50.5 P = 25 P = 25 2 B 4 A 1 44 12 X Stations
2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2
(Detection at stroke end) and Its Mounting Height [mm] Auto Switch Proper Mounting Position (Standard type) Auto switch model D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 D-A9l D-A9lV D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5
D-G39 D-G39C D-K39 D-K39C D-A5< D-A6< D-A3< D-A3
D-Z7m D-Z8m D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10
): Dimension of the D-A96 D-A9V D-M9V D-M9WV D-M9AV Auto switch Auto switch Hs Hs A B A B 21.5 (23.5) 23.5 14.5 14.5 12.5 12.5 ( ): Dimension of the D-M9AV D-A7/A80 D-A73C/A80C D-A79W D-F7/J79 D-F7W/J79W D-F79F/F7BA Auto switch Auto switch Hs Hs Hs Hs A B A B D-A7H/A80H D-F7V/F7WV D-F7BAV D-J79C Auto switch Auto switch B A A B 10 Auto Switch Mounting Series CJ2Y Auto Switch Proper Mounting
rib O Deep type B Bellows type List o Pad dia.
rib O Deep type B Bellows type List o Pad dia.
) A B Coil voltage 24 VDC 5 P EA EB 3 position closed center A B 3 Function Note 1) EAPEB Standard type (1 W) External pilot Low wattage type (0.5 W) Nil R Y 3 position exhaust center A B Note 2) 4 Note 1) When specifying more than one option, enter symbols in alphabetical order.
Recommended Parameter Values [LEF] LEFS25T6 LEFS32T7 LEFS40T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.
pressure switch *5 67 Regulator AR20-B to AR60-B Series Regulator with Backow Function AR20K-B to AR60K-B Series AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW AR40-B, AR40K-B AR20-B, AR20K-B Nq Body size 20 25 30 40 50 60 Symbol Description c Set pressure *6 Nil 0.05 to 0.85 MPa setting 1 0.02 to 0.2 MPa setting + d Exhaust mechanism Nil Relieving type N Non-relieving
30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002