Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1490 1320 1650 1160 990 495 660 825 330 1650 IN 2810 2500 3120 2180 1870 936 1250 1560 624 3120 OUT 63 20 2520 2240 2800 1960 1680 840 1120 1400 560 2800 IN 4530 4020 5030 3520 3020 1510 2010 2520 1010 5030 OUT 80 25 4090 3630 4540 3180 2720 1360 1820

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1490 1320 1650 1160 990 495 660 825 330 1650 IN 2810 2500 3120 2180 1870 936 1250 1560 624 3120 OUT 63 20 2520 2240 2800 1960 1680 840 1120 1400 560 2800 IN 4530 4020 5030 3520 3020 1510 2010 2520 1010 5030 OUT 80 25 4090 3630 4540 3180 2720 1360 1820

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

that will not exceed the absorption capacity of the air cushion and stroke adjusting unit. 80 10 70 45 25 1.96 8.83 4.22 6.86 8.34 Extended Spring force (N) 4.22 20.01 6.86 15.98 20.50 Compressed Operating temperature range (C) Standard Stroke 5 to 60 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) Weight Unit: kg 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400

Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 80mm, Thread: Rc (M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 100mm, Auto Switch: G5BA--Solid State, Water Resist., 2 Wire, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 80mm, Thread: Rc (M5 for Air Cushion 20 & 25 Bore), Seal Material: R (NBR), Stroke: 150mm, Auto Switch: G5BA--Solid State, Water Resist., 2 Wire, Lead Wire or Prewired Connector: Z (5m)

Magnet: Built-In, Mounting: Front Flange Type, Cushion: Non-lube, Air Cushion, Bore Size: 80mm, Thread: PT Ports, Seal Material: NBR, Stroke: 100mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -, English Rod Thread: -

Magnet: Built-In, Mounting: Front Flange Type, Cushion: Non-lube, Air Cushion, Bore Size: 80mm, Thread: PT Ports, Seal Material: NBR, Stroke: 150mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 5m, Number: -, English Rod Thread: -

Auto switches are available.Low profile , Both single shaft and double shaft are available in all sizes , 2 auto switches are mountable on the same side , Rotating angle adjusting range: 350° to 370° , Options include magnet, shaft type, port thread style, and air cushion, Compact Rotary Actuator, ROTARY ACTUATOR, 525, 1400 lb

Auto switches are available.Low profile , Both single shaft and double shaft are available in all sizes , 2 auto switches are mountable on the same side , Rotating angle adjusting range: 350° to 370° , Options include magnet, shaft type, port thread style, and air cushion, Compact Rotary Actuator, ROTARY ACTUATOR, 525, 1400 lb

Auto switches are available.Low profile , Both single shaft and double shaft are available in all sizes , 2 auto switches are mountable on the same side , Rotating angle adjusting range: 350° to 370° , Options include magnet, shaft type, port thread style, and air cushion, Compact Rotary Actuator, ROTARY ACTUATOR, 525, 1400 lb

Auto switches are available.Low profile , Both single shaft and double shaft are available in all sizes , 2 auto switches are mountable on the same side , Rotating angle adjusting range: 350° to 370° , Options include magnet, shaft type, port thread style, and air cushion, Compact Rotary Actuator, ROTARY ACTUATOR, 525, 1400 lb

NCDA1F400-1400-XB5, TIE ROD CYLINDER, E14, 8.65 lb

NCDA1G325-1400-XA28F, TIE ROD CYLINDER, 7.09 lb

PFxx-OMY0005

U8 0 Y 0: 1_P (Normal output) 1: 1_n (Reverse output) 1340 0x053C 0 R/W 0: FLoW (Flow rate) 1: Temp (Temperature) 2: PrES (Pressure) 3: AC (Accumulated) 4: PLS OUT2 setting OUT2 (Select the target for setting) U8 0 Y 1400 0x0578 0 R/W (Accumulated pulse) 5: Err (Error output) 6: oFF (Output OFF) ModE2 (Selection of output mode) 0: HYS (Hysteresis) 1: Wind 1 R/W U8 0 Y (Window comparator)

IZx-OMX0087

5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400

Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.

Low-Speed Rotary Actuator

NPT 1/8 , NPTF 1/8 Output (Nm) { At 0.5MPa } 0.3 0.75 1.8 3.1 5.3 Table 2 Allowable kinetic energy and adjustment range of rotating time Rotating speed adjustment range having Size Allowable kinetic energy stable operation J s/90 10 0.00025 0.7 to 5 15 0.00039 20 0.025 1 to 5 30 0.048 40 0.081 Weight Table 3 Weight (g) Weight * Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400

LEF-OM002xx

LEF Series / Belt drive Specification (1) Step motor (servo 24VDC) Belt drive LEFB32 LEFB25 LEFB16 Model 300, 500, 600, 700, 800, 300, 500, 600, 800, 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 900, 1000, 1200, 1500, Stroke [mm] Note1) 900, 1000 1800, 2000 1800, 2000 1 10 19 LECP6/LECP1/LECPMJ/JXC91 Work load [kg] note2) Horizontal 1 5 14 LECPA Actuator specification 48 to 1100 48 to 1400

SFOD-OMT0009CN

[mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250 150 350 250 200 [mm/s] 20 10 20 10 () [mm/s] 25 13 27 14 () 109 No.SFOD-OMT0009CN-B 1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 [mm/s] 1100 1400