TABLE OF CONTENTS

M975-C 75 75 430F SS 430F SS NPT NPT EXAMPLE: Inline Filter NPT 60 Micron Brass Body No.F660-A FILTER/STRAINER SPECIFICATIONS: Pipe Size: 1/8 NPT CV=.23 Screen Rating: 43 Micron or 140 Micron Max.

CA2

side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 Different sides With n D-A44 Same side 10 20 100 75 80 90 75 80 90 100 100 100 1 Different sides

ZP

Y Model A B C D Flat Model ZPT40D10-6-A14 55 124 Flat with ribs U C ZPT50 -6-A14 U C ZPT40D20-6-A14 ZPT40 -6-A14 65 127 50 18.5 32 6.5 3.3 40 43 ZPT40D30-6-A14 75 137 19.5 33 7.5 3.8 50 53 ZPT40D50-6-A14 95 182 75 Dimensions by Stroke 40 50 G Model E F E F U C ZPT 20-6-A14 U C ZPT 30-6-A14 U C ZPT 50-6-A14 U C ZPT 10-6-A14 113.5 45.5 114.5 44.5 116.5 55.5 117.5 50 54.5 126.5 65.5 127.5 64.5

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

JIS Standard Hydraulic Cylinder

B-series M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 31.5 30 20 24 M30 x 1.5 dH10 L L M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 M39 x 1.5 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 40 25 26 M48 x 1.5 H +0.4 +0.1 D M5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M20 x 1.5 B J M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 C-series M24

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2 4 6 8 0 5 10 15 20 Work load [kg] Work load [kg] LEFS25lV6B/Ball Screw Drive LEFS25lV6B/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

Battery-less

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

7ND9071en

T100 C IP66, AEx tb IIIC T100 C IP66 Ambient temperature ranges T6 T5 T4 ND9_E2 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60

MB

MB MBW MBK MBQ A C Standard model no.

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Modular/F.R.L. Units Series AC

55 55 72.5 77.5 A2 43 57 57 75 80 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 AC20C AC25C AC30C AC40C AC40C-06 Attachment Model A1: Dimensions from the end of the IN side to the center of the mounting hole for the first bracket.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

C DH7 EN 0 0.1 ER (Max.)

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Dual Rod Cylinder Series CXSJ/CXS

49) 75 0.2 16 (mm) S SS ZZ Z Part no.

V100

[dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv VZ312 VZ322 VZ314 VZ324 N.C. 0.53 0.66 1.2 1.3 0.45 0.45 0.41 0.37 0.14 0.18 0.32 0.33 0.47 0.66 1.1 1.2 0.39 0.45 0.46 0.48 0.12 0.18 0.32 0.34 M5 75 Body ported N.O.

CL

D C B H d Tube I.D.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

B stroke When air pressure is supplied to ports C and D, both strokes A and B out strokes. D C B C A B A D When air pressure is supplied to ports B and C, A out strokes. A stroke B stroke A stroke Dimensions (Dimensions other than below are the same as standard type.)

Combination Cylinder

C shape 8 for axis C shape 10 for axis C shape 10 for axis NT-02 NT-03 NT-G04 C shape 8 for axis C shape 10 for axis 13 17 19 20 25, 32 40 15.0 19.6 21.9 12.5 16.5 18 M8 M10 X 1.25 M14 X 1.5 5 6 8 20 IY-G02 0.040 0.076 8 CD-G02 16.2 20 21 7.6 1.5 0.9 0.040 0.076 8 0.9 7.6 38.6 43.4 1.5 IY-G03 0.040 0.076 10 0.040 0.076 10 CD-G25 20.2 25.6 1.55 25, 32 9.6 1.15 9.6 42.6 1.55 1.15 25 48 C shape

CHKD/CHKG

CHKGL--XC64 A C C B 293