VCA

AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side port) Mounting screw (side port) q q Steel Steel Mounting screw (front port) Mounting screw (front port) End plate assembly (D side, side port) End plate assembly (D side, side port) w w Aluminum Aluminum End plate assembly (D side, front port)

Compact 5-Port Solenoid Valve

J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping.

OMU0023

Step Request data Response data Operation details 1 01 03 0600 0004 01 03 08 Acquires the alarm history. 2 Alarm history confirmation Confirms the acquired alarm history. (9) Alarm history clearance example E.g) The Alarm History saved in the Card Motor controller (controller ID1) is cleared.

V100

K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7 1 NAMUR Interface 3 Port Solenoid Valve Series VFN200N

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

ALF400 ALF-3 ALF-3-X208 12316 ALF400-06 ALF500 ALF600 ALF800 ALF900 Standard X208 ALF-3 ALF-3-X208 12316 ALF-3 ALF-3-X208 12316 ALF-3 ALF-3-X208 12316 ALF-3 ALF-3-X208 12316 ALF-3 ALF-3-X208 12316 1 Auto feed 3 Sight dome 4 Polycarbonate 1 123122-3A (04) 123122-2A (03) 123122-1A (02) 123417A (12) 123416A (14) Bumper assembly 5 123122-3A 123210A 123310A 12356A 1 Needle stud assembly Retainer

•

Pad Type Lislf} Vacuum Entry"Mounling SmIxj TlTeEif ~~zeJ n .s ."0-"16 'DiiltiMi) j 04 4 Tube 06 6 Tube ~I 08 B Tube ~20 ':" 32 140-5Il : I 4 h 2 4 6 8 10 13 16 20 25 32 40 50 Ast type T Rat with rib DNptype Bellows type M5 x Q.8 '1\6' M6 x 1 2' U A8 Ma XI I ~1 B4 M4 x 0.7 B5 M5 x O .8 J~ 86 M6 X' , ,'. , Bjj M8xl.25 AS j!

SX

AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB Series CS1 SGP10A x

VCW

4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H J L Bracket part no.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

assembly For A, B port SY9000 58A 02 03 B 2 For P, E port SY9000 58B 03 A 4 Clip Thread type SJ Nil F N T Rc G NPT NPTF SY SV P B B B B Note 1) Be careful to avoid damage or contamination of O-rings, as this can cause air leakage.

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

JIS Standard Hydraulic Cylinder

Auto switch model Cylinder model Bore size (mm) 80 63 50 40 32 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Note 2) BA7-063 BA7-063 BA7-080 BS5-160 BS5-180 CH2E/H/F D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 The figure shows how auto switch models, D-M9(V), M9W(V), and M9A(V) are mounted.

10

Note) L Note) J Note) M Note) K Note) J Note) L Note) K Note) M Note) L Note) N Note) M Note) N Note) Note) Since the bracket is attached to the resin body type H, J, K, L, M, N, XB cannot be selected.

Pressure Relief 3 Port Valve With Locking Holes

F,N)06A,B(-B,S)(-K,R,Z) VHS5510-(F,N)06~10A,B(-B,S)(-R,Z) Contents PAGE 1.

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Electro-Pneumatic Valve NVEP/NVEF Series

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

ASN AQ ASV AK How to Order VCHC F S 1 0 03 06 3 2 AS ASR ASQ Hexagon lock nut Round lock nut J Nil Lock nut option Speed controller Option None Electroless nickel plated Nil N Body size 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size Note) With seal 04 06 08 10 12 4 6 8 10 12 Made to Order Refer to page 612 for details.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Filter Regulator AW-B Series 1021AW K-B Series 1021Filter Regulator with Backflow Function How to Order Clean series "J" must always be selected. K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.