Vacuum Unit

pages 11 and 12, and r on page 13.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

One-touch fitting No Refer to One-touch fitting part number information on page 51. 9 SX3000-115-2 Clip 10 11 Series SZ3000 JIS symbol SZ3A60 [N.C. valve x 2pcs.] 4 position dual 3 port valve SZ3A60 [N.C. valve x 2pcs.] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3A60K/With back pressure check valve 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 5 (R) 1 (P) 3 (R) 1 (P) SZ3B60 [N.O.valve x 2pcs.]

Slide Unit Series CX2/CXWM/CXWL

through 4 x 8 counterbore depth 4.5 2 x 2 x M5 x 0.8 Thread depth 10 2 x M8 x 1.0 RB0805 Shock absorber 2 x 2 x 5H7 depth 6 +0.012 0 484 Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 16 With End Lock: CXWM16Stroke/50 to 200 R 2 x 2 x M5 x 0.8 thread depth 10 Max.

Slide Unit Series CX2/CXWM/CXWL

through 4 x 8 counterbore depth 4.5 2 x 2 x M5 x 0.8 Thread depth 10 2 x M8 x 1.0 RB0805 Shock absorber 2 x 2 x 5H7 depth 6 +0.012 0 484 Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 16 With End Lock: CXWM16Stroke/50 to 200 R 2 x 2 x M5 x 0.8 thread depth 10 Max.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

VQ7-6/7-8

Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

VQ7-6/7-8

seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

Fieldbus System

EXH port] (Double sided type: C12) Digital Output Unit C10: 10 One-touch fitting (C12: 12 One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 1 A 1 A A A A A A A 13.5 10 (12) 25 (7.5) C10: 10 One-touch fitting

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

G15/G27

-10-01 to 02-X3 G43-2-01 to 02-X4 G43-4-01 to 02-X4 G43-6-01-X4 G43-7-01 to 02-X4 G43-10-01 to 02-X4 8 1 R , 4 1 R 1 4 The dimensions in ( ): Connecting thread R X2: Stud parts nickle plated 8 1 R 8 1 R , 4 1 R 8 1 R , 4 1 R X3: Wetted parts stainless steel MPa 8 1 R 8 1 R , 4 1 R 8 1 R , 4 1 R X4: Oil-free (Wetted parts degreasing) 8 1 R 8 1 R , 4 1 R Note 1) Do not apply pressure more than

o

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

o

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

HRX-OM-X027

Present/ Setting up conditions Humidity Temperature Right after setting up HRS-R Series 9.9 Daily Check Sheet 9-11 HRX-OM-X027 Chapter 9 Documents 9.9 Daily Check Sheet HRS-R Series 9-12 HRX-OM-X027 Chapter 10 Product Warranty Chapter 10 Product Warranty 1.

4-channel Flow Monitor ( compatible)

. 0: 0.1 1: 1 2: 10 3: 100 UAC (Accumulated minimum unit for connection product [USEr]) Y U8 0x01 12 R/W (1) Set the accumulated volume per pulse when the user's additional range is selected. 0: 0.1 1: 1 2: 10 3: 100 UPLS (Accumulated volume per pulse for connection product [USEr]) Y U8 0x02 13 R/W (2) 0: L 1: oC 2: Ft 3: GAL 4: F 5: oFF 14 R/W Unit setting (USEr is selected) Y U8 0x00 (0

45

Direction P, R port A, B port specifications C8 (One-touch fitting for 8) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size A, B port 2 to 10 stations: W = 22n + 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)