Table of Contents

8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1 1 flange 0.38 0.55 0.9 1.4 2.1 4.2 10.5 50 52 72 87 Weight (kg) JIS Symbol Note) Max. flow is at 0.7 MPa.

High Vacuum Angle Valve

magnet) Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-7 1.3 x 10-9 (FKM) None A B C Note 1) Standard lead wire length is 0.5 m.

Stability of suction position,

9 35 9 9 9 9 B A 15 35 B A 35 14.5 Bushing Bushing Bushing M18 x 1.5 M10 x 1 M18 x 1.5 M18 x 1.5 B A M10 x 1 M10 x 1 Seal washer Seal washer Seal washer D D D D D D 40 26.5 31 31 26 26 2 3 53 50 6 40 6 35 32 6 Width across flats 6 2.5 14.5 Width across flats 6 Width across flats 6 43 19 19 19 D-D D-D D-D 16 16 16 8.5 8.5 8.5 Dimensions Dimensions Dimensions Model A B ZP3E-Y32UMlJB10 66.6

Sine Rodless Cylinder Series REA/REB

9 q !4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 @6 REBHT32 Component Parts Component Parts No. Description No.

KJ

Body size KK3P-50N KKH3S-50N 5/8 5/8 -60N -60N 6/9 6/9 1/8 1/8 -65N -65N 6.5/10 6.5/10 KK4P-50N KKH4S-50N 5/8 5/8 -60N -60N 6/9 6/9 -65N -65N 6.5/10 6.5/10 1/4 1/4 -80N -80N 8/12 8/12 -85N -85N 8.5/12.5 8.5/12.5 Series KKH are only available as sockets.

Electric Actuator

thread M (1 rod end nut is included.)

CNA

For detailed specifications, refer to page 9-15-1.

CNA

For detailed specifications, refer to page 9-15-1.

NCQ8

Applicable Stroke Unit: inch Bore size Standard stroke 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 012 (1/8"), 025 (1/4"), 037 (3/8"), 050 (1/2") 062 (5/8"), 075 (3/4"), 087(7/8"), 100 (1") 125 (1-1/4"), 150(1-1/2"), 175(1-3/4"), 200 (2") 250 (2-1/2"), 300 (3"), 350 (3-1/2"), 400 (4") With switch is available on strokes 025 (1/4") and greater.

Applicable Auto Switch Model

10 8.5 25 9.5 9 10 32 11 11 Note) qIn the case operation load is an inductive load.

Rotary Actuator/Vane Type

Size: 10 31 2 x M3 x 0.5 through 2 x 3.5 through 25 Chamfer (Rotation range is stated on page 70.) 25 31 41 B port A port 29 9h9 0 0.036 17 4g70.004 0.016 0.5 2 x 3.5 through 9 14 31 29 1 3 10.6 7 16.5 9.5 2 x M3 x 0.5 1 18.5 35 19.8 67 2 15 When D-M9m is used *1.

Battery-less

9 o @1 @2 !1 !9 @0 !8 @0 !0 !8 !4 u u !2 !3 i e !5 r t w q y !6 !

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

ISO Cylinder

Nil 2 S 1 n n A Rail mounting B Band mounting Head cover type *1 The symbol is Nil for no magnet.

10

9 !1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Station 11 SOL.b Station 8 SOL.b 22 16 SOL.a SOL.a 21 15 Station 2 SOL.b Station 2 SOL.b 4 4 SOL.a SOL.a 3 3 Station 1 SOL.b Station 1 SOL.b 2 2 SOL.a SOL.a 1 1 Triangle mark Triangle mark This circuit is for the double wiring specification with up to 9 stations.

SYJ300/500/700

+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

Step Motor Controller

Power supply cable (LEC-CK1-1) is an accessory.

Electric Actuator

Power supply cable (LEC-CK1-1) is an accessory.

Table of Contents

06 ZZR1 R 1 R1 ZR1 1 1 RV ZR1 Port location Stations R L Left side Right side 01 1 Arrangement (Right valve station which is looked from valve side is first station.) Arrangement (Right valve station which is looked from valve side is first station.)