HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Series SV

(S, R, RS) P PG PH 1 2 U D B (-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

H T E d W T D L Max.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Metric size Inch size Elbow Universal 2 3 1/8" 01 23 AS 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" AS-FE KE 6 3/16" Control U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

CA2

/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F/F5NTL Axial foot style BT-04 BT-04 BT-06 BT-08 BT-08 Flange style Basic weight CJ1 Single clevis style D-A3/A44 D-G39/K39 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G59F D-G5NTL D-A3C/A44C D-G39C/K39C BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M CJP Double clevis style Trunnion style CJ2 BA-04 BA-05 BA-06 BA-08 BA-10 All mounting brackets Additional weight

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Title not found

, H, L r u. E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

NCG/CG1

, D-C8 20 to 63 D-G5, D-K5, D-G5W, D-G5BAL D-K59W, D-G59F, D-G5NTL = ~ Hs Auto switch Auto switch = ~Hs D-M9, D-M9W, D-M9A 20 to 63 D-C73C, D-C80C 20 to 63 Auto switch = ~ Hs Auto switch = ~Hs D-B5, D-B6, D-B59W 20 to 100 Auto switch = ~ Hs Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NTL D-G5BAL D-G5NTL D-G59F D-G5BAL D-B5/B6 D-B59W D-G5

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Universal Metric size 04 06 08 10 12 Inch size 01 KE 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 03 05 07 09 11 AS-FG With One-touch fitting AS-FP AS-FM M5 Port size AS-D AS-D M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 AS-T ASP Caution U10/32 N01 N02 N03 N04 ASN Be sure to read this before handling the products.

Compact Manifold Regulator

Note 3) This option is available with the digital pressure switch. 732 Compact Manifold Regulator ARM11A/B Series Regulator Block ARM11B 1 A R 06 Z A q w e r u t y N Individual Supply Type ARJ 1.

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

M-E05-1-LQ1

D-G d

Title not found

(Example) D-r7A1L o (.) Most sensitive position/Operatinq range incn (mm) i i . : i l i . . , : i r i r r i . r r i , , I i I i r I i i ] i : I I i I I i I I i . i D-H7A2 ( ) D-H7B ( + ) Solid slale swilch* ar ihlerchMgable with Ed 6wilches. D C7 lype D-HT lype I SERIES NCDJ2 D-C73c, D-C80C Band Mounted Reed Type Soecifications & ]J -v -rtF !F .

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

(Example) D-r7A1L o (.) Most sensitive position/Operatinq range incn (mm) i i . : i l i . . , : i r i r r i . r r i , , I i I i r I i i ] i : I I i I I i I I i . i D-H7A2 ( ) D-H7B ( + ) Solid slale swilch* ar ihlerchMgable with Ed 6wilches. D C7 lype D-HT lype I SERIES NCDJ2 D-C73c, D-C80C Band Mounted Reed Type Soecifications & ]J -v -rtF !F .

AR Series Modular Type Regulator

-A AF 0.3 0.25 Outlet pressure (MPa) Set point 0.2 0.15 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 453 AR10-A to AR40-A Series Construction AR10-A AR20-A to 40-06-A t e t e q IN OUT IN OUT r r q w w Component Parts No.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.