Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

30

Plug: KQB2P Applicable fitting size d A Weight (g) D L Model L A KQB2P-23 KQB2P-04 KQB2P-06 KQB2P-08 KQB2P-10 KQB2P-12 KQB2P-16 3.2 4 6 8 10 12 16 2.8 4.3 9 16.3 25.4 37.8 69.2 5 6 8 10 12 14 18 28.9 29.6 30.8 33.7 34.6 36.5 38.6 16.9 17 17.2 17.6 17.6 17.9 17.8 D d Applicable fitting size d 8 Metal One-touch Fittings Applicable Tube: Inch Size, Connection Thread: UNF, NPT Series KQB2 RoHS

Series AS-FM/AS-M/ASD-FM

standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 D2 L2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Table of Contents - Tubing

Model 6 Size: nominal size X length Number of pieces 8 12 4 6 8 10 12 TM-04 TM-06 TM-08 TM-10 TM-12 2 X 6 2.6 X 8 4 3 X 8 Tube Release Tool Series TG To remove tube in a confined space or from manifolded one-touch fittings.

5-Port Solenoid Valve

Dimensions Applicable fitting size d (Metric size) Model A L D Applicable fitting size d (Inch size) Model A L D 2 KJP-02 8.2 17 3 3.2 KQ2P-23 16 31.5 5 4 KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 12 KQ2P-12 24 45.5 14 1/8" KQ2P-01 16 31.5 5 5/32" KQ2P-03 16 32 6 1/4" KQ2P-07 18 35 8.5 5/16" KQ2P-09 20.5 39 10 3/8" KQ2P-11 22 43 11.5 d D A L * Shipped together

Smooth Cylinder/Low Speed Cylinder

Operating Range (mm) (mm) Auto switch model Bore size (mm) Auto switch model Bore size (mm) 20 25 32 6 40 6 20 25 32 12 40 13 D-A9(V) D-M9(V) D-M9W(V) D-M9A(V) D-C7/C80 D-C73C/C80C D-B5/B64 D-A3A/A44A D-B59W D-H7/H7W D-G5NT/H7NF D-H7C D-G39A/K39A 12 13 6 6 4 5 4 4.5 3.5 3 3 3.5 7 8 8.5 9 9 9 10 9 7 8 8 8 8 9 8 9 Since this is a guideline including hysteresis, not meant to be guaranteed.

HRX-OM-O021

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

H/DL/L/LL

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

AC Servo Motor Driver (Pulse input type/Positioning type ）

load ratio [8] [8] Effective load ratio [8] [9] Peak load ratio [8] [A] Instantaneous torque [8] [B] Position within one-revolution [8] [C] ABS counter [8] [D] Load to motor inertia ratio [8] [E] Bus voltage [8] [F] Load-side cumulative feedback pulses [9] [0] Load-side droop pulses [9] [1] Load-side encoder information 1 Z-phase counter [9] [2] Load-side encoder information 2 [9] [6] Temperature

2/3 Port Valve for Various

+ PB 7/ VXP2130 Threaded type # 7 8! , :! 7 # , :! 7 Rated voltage 7. -/ VXP214 VXP215 VXP226 VXP227 VXP238 VXP239 Flange type 2 0 2 0 # , 8 3 7// ! -// 8: ! 77/ ! --/ ! -8/ 2 0 # 7 -. ,. 8/ 2 0 ( 7 8 7 # 7 # 7 2 0 -8 73 2 0 # ./ Material VXP227 VXP238 VXP239 2 0 ,,. 8/ 8/ ./ ./ 2 0 ! "#! &*)! '$()! $%&' 2 0 17-3-43 The VX series will be revised shortly.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Position Auto Switch Mounting Height D-C7/C8 D-H7 D-H7W D-H7F D-H7BAL Auto switch model D-C7/C8 D-C73C/ C80C D-H7W D-H7NF D-H7BAL D-H7 D-H7C C85 D-B5/B6 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-B5/B6 D-B59W D-G5NTL C95 Applicable bore size (mm) A B A B A B A B A B HS HS HS CP95 20 9 3 6 8 4.5 24.5 27 27.5 20.5 15.5 17.5 19.5 16 25 9 3 6 8 4.5 27 29.5 30 20.5 15.5 17.5 19.5 16 NCM 32 10 4 7 9

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.