Digital Flow Switch (Manifold type)

mm) Unit construction Flow range Port size A B C D E F Symbol Flow adjustment valve Stop valve Nil 31.9 127.9 (Max. 132.9) S 31.9 0.5 to 4 L/min 3/8 141.7 102.6 87.5 87.5 (symbol 04) (symbol 03) P 65.9 W 65.9 Nil 35.9 3/8 127.9 (Max. 132.9) S 35.9 2 to 16 L/min (symbol 03) 141.7 102.6 87.5 87.5 (symbol 20) 1/2 P 69.9 (symbol 04) W 69.9 Nil 51 1/2 137.5 (Max. 143.2) S 51 5 to 40 L/min

HRX-OM-X027

OptionOptional Accessories . 6-1 6.1 Option B [Earth leakage breaker] . 6-1 6.1.1 Option B [Earth leakage breaker] . 6-1 6.2 Option J [Automatic fluid filling] . 6-1 6.2.1 Option J [Automatic fluid filling] . 6-1 6.3 Option L [Large capacity tank] . 6-2 6.3.1 Option L [Large capacity tank] . 6-2 6.4 Option V [Stainless steel enclosure] . 6-3 6.4.1 Option V [Stainless steel enclosure] . 6-

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

2/3 Port Valve for Various

) $ % *%+ * ,* VX021-003BTZ-05 Coil Combination Made to Order Specifications . / / 0 1 " 1 / / 2Splashproof Specifications ( ) ) @" A ) "=A" 1 ( 5 % / / 33 1 '4 % ) 3 ) / & / / 0 5 % / / 5 % * ,* -5 % ) / *% 5 % *%+ * ,* -6 6 7 8 6 6 8 6 6 7 8 6 6 ) 9 9 9: 9; 79 79 79: 79; ! 6 6 6 !"# !9 !9 !9: !9; -/& ,* $ % *%+ * ,* -3$ < ) ( !

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

HRX-OM-W038

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached

Silencer Series AN

Construction/Parts/Dimensions AN10-C to 30-C B Dimensions (mm) Sound absorbing material A B C d 6 Model AN10-C06 AN10-C07 AN15-C08 AN20-C10 AN20-C11 AN30-C12 A C (Resin sintered body) 36.5 11 14.5 1/4 45 13 20 8 Body (Resin) 10 57.5 16.5 30.5 3/8 71.5 20 43.5 12 d 3 Silencer Metal Body Type Series AN00 RoHS How to Order Noise reduction 30 dB(A) Low back pressure Easy mounting 500 AN 06 Port

2/3 Port Valve for Various

) $ % *%+ * ,* VX021-003BTZ-05 Coil Combination Made to Order Specifications . / / 0 1 " 1 / / 2Splashproof Specifications ( ) ) @" A ) "=A" 1 ( 5 % / / 33 1 '4 % ) 3 ) / & / / 0 5 % / / 5 % * ,* -5 % ) / *% 5 % *%+ * ,* -6 6 7 8 6 6 8 6 6 7 8 6 6 ) 9 9 9: 9; 79 79 79: 79; ! 6 6 6 !"# !9 !9 !9: !9; -/& ,* $ % *%+ * ,* -3$ < ) ( !

JXCx-OMX0009

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m (b) (d) Shield Signal name Terminal No.

5

= 2, 3, 4, 5) D-M9V 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9V 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9 D-A9 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9W 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9A 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7/A80 D-A7H/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4, 6) Note 4) Rail mounting

Magnetically Coupled Rodless Cylinder

D-A9 D-M9 D-F9W D-Z7 D-Z80 D-Y59 D-Y7 D-Y7W 8 3 4.5 8 3 5 9 4 5.5 7 3 4.5 6 3 4 6 3.5 4.5 11 4.5 7 8 2.5 4 8 3 4 A B 9 10 9 9 11 6 6 5 5 6 C D Switches cannot be mounted in some cases.

AC Servo Motor Driver (Network card type ）

OUTLINE DRAWINGS 9.1 Driver (1) LECSN2-T5/LECSN2-T7/LECSN2-T8 [Unit: mm] 50 6 mounting hole Approx. 80 161 6 Lock knob 6 6 CNP1 CNP2 161 168 156 CNP3 PE LECWith MR-BAT6V1SET-A 6 Approx. 51 Approx. 37.5 Approx. 28.4 5 Mass: 1.0 [kg] Mounting screw Terminal Screw size: M5 Tightening torque: 3.24 [Nm] CNP1 L1 L2 Approx. 50 Approx. 6 Approx. 6 L3 2-M5 screw Approx. 6 NP3 P4 CNP2 P+ C D Approx

Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

JXCx-OMT0061CN

) 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 1.5m 1 Green 3 COM-A/COM B-3 Blue 4 COM-B/ A-3 3m 3 Shield Cable color Terminal no. 5m 5 Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 3 S Standard cable signal Terminal no.

HRX-OM-R005

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Q = D __ 4 6 _ 1000 Q = (D d) __ 4 6 _ 1000 Formula (1) .