High Purity Chemical Valve

Port size Symbol 01 02 02 03 03 04 Body class Port size 1/8 1/4 1/4 3/8 3/8 1/2 Pilot port thread type 2 Symbol Nil N Thread type Rc NPT 3 4 Integral fitting type/Variations Model LVH20 LVH30 LVH40 Orifice diameter 4 8 10 Tubing O.D. Metric 3, 4, 6 6, 8, 10 10, 12 Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AQ 3.2 4 6 3.2 4 6 8 4 6 8 10 AS131FM-M5-23 AS131FM-M5-04 AS131FM-M5-06 AS231FM-01-23 AS231FM-01-04 AS231FM-01-06 AS231FM-01-08 AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 19.8 20.3 21.4 24.4 24.9 26.9 30.9 30.6 34 35.2 38.7 8.4 9.3 11.6 8.4 9.3 11.6 15.2 10.4 12.8 15.2 18.5 28.7 12.7 17.5 M5 x 0.8 8 8 28.8 33.8 25.1 30.1 9.6 9.3 10.8 31.8 13.5 20.6 ASV 17 31.8 12.7 17.5 9.3 13.1

ASR

6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/4, 1/8 port (A port) 25 12 12 70.7 [72.9] G: Approx. 300 H: Approx. 600 (Lead wire length) 48.5 A 18 27 34 R P Manual override 2 x 4.5 (For mounting) 40 4 (Light/surge voltage suppressor) + 58 [65] 54.5 42.6 26 X 20 20 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): 10-SYJ74M-LM plug connector (M): 10-SYJ74M-M01 02 DIN terminal (D, Y): 10-SYJ74MD Y01 02 M8 connector (WO): 10-SYJ74M-WO01

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 29.4 12 17.5 12.9 29.6 33.8 28.8 7.8 11.7 9.6 10 34.6 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 32.5 13 13.7 20.6 34.6 6 ASD330FM-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 10.6 14.2 11.8 12 32.1 27.1 R 1/8 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430FM-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430FM-02-08S

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

Series AS-FM/AS-M/ASD-FM

Weight g d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 12 29.4 17.5 12.9 29.6 33.8 28.8 9.6 10 34.6 M5 x 0.8 8 30.1 25.1 7.8 11.7 6 ASD230FM-M5-06 11.6 13 32.5 20.6 13.7 34.6 39.6 6 ASD330FM-01-06S 14 11.6 29 38.5 22.9 13.7 36.1 31.1 14.2 11.8 R1/8 12 32.1 27.1 10.6 15.8 33.9 38.9 8 ASD330FM-01-08S 15.2 31 44.8 28.2 18.5 6 ASD430FM-02-06S 12.8 53 43.5 25.2 17 18 8 ASD430FM-02-08S 36.8

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

Free Mount Cylinder

(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 M5 x 0.8 Rc 5 7 20 32 2 6 7 8 13 17 28 16.5 31 1 8 Rc 1 8 Rc 1 8 Rc 1 8 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

ZP

Width across flat 30 (Hexagon) 21 50 Bushing 8 8 50 Bushing 8 8 M22 x 1.5 M22 x 1.5 G (H) Width across flat 22 (Hexagon) Rc1/8 (H) Rc1/8 Width across flat 22 (Hexagon) 46 68.5 67.5 29.5 20 70 45 28.5 4 x M5 x 12 19 50 4 x M4 x 10 X F X Y F Y 30 4 30 4 34 40 D D A A B B E E Dimensions Dimensions Model D A B E F G 44 80 120 155 44 80 120 155 H 214 X Y Model D A B E F G 44 80 120 155 44 80

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Modular Type Filter Regulator Series AW

(The SI unit type is provided for use in Japan.) 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Option Note 3) Symbol Nil B C D H Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) AW20(K) to 40(K) Description With bracket Float type auto drain (N.C.) Float type auto drain (N.O.)

Base Mounted Metal Seal/Rubber Seal Series VQ

6 One-touch fitting for 8 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 01 02 C6 C8 DIN rail mounting style (For manifold) D One-touch fitting for 6 One-touch fitting for 8 F With bracket N Name plate Manifold Note) Drop prevention Intermediate stops When two or more symbols are specified, indicate them alphabetically.

5 Port Solenoid Valve SY Series

One-touch fitting for Symbol Port size M5 x 0.8 SY3000 Applicable series 5 16" VVQ2000-51A-C8 VVQ2000-51A-N9 One-touch fitting for 8 One-touch fitting for SY7000 SY7000 M5 3 8" VVQ2000-51A-C10 VVQ2000-51A-N11 One-touch fitting for 10 One-touch fitting for 01 1 8 SY5000 5 16" VVQ4000-50B-C8 VVQ4000-50B-N9 One-touch fitting for 8 One-touch fitting for SY9000 SY7000 02 02 03 1 4 SY9000 3

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Table of Contents

AFF37B AFF75B Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to

Booster Regulator/Air Tank

150 500 250 250 824 846 (mm) A 531 570 494 527 B 444 479.8 444 479.8 C 3/8 1/2 3/8 1/2 D Note) 519 543 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Note Symbol 02 Symbol 02 2 stations 2 stations Note 1) Connector mounting position Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... 10 02 11 02 11 stations 10 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout Note 2) Specified layout (up to 22 solenoids possible) (up to 21 solenoids possible) 20 20 20 stations 20

IIIIIII

F ' 3 97 lbs (1 .8 Kq) P T , 0.06 in. (1.5 mn o.T. 0.08 in. (2 0 mm) T T O-14 in 13 5 mml A B c D E tCi H J K 4-9:z (1 25) 1 . 1 8 (30) 3.94 r100) 0.98 (251 0 6 9 (17.5) 0.33 {a 5l u.c9 (1 5) 0.10 (2.s)o.71 {1.8) o.37 (9.5) Millimeters in Parentheses t75 PSIG (5 Kgt/cm2) Panel Mounting o F.' 3.97lbs. (1.8 Kq) P T . 0.06 in (1.5 mn A B c D E F G H J K 4.98 126.5) 1 . 1 8 (30t 3.94 (100) 1.04