VQZ1000/2000/3000 51 45 2(B), 2(A) port 22 16 SMC 9 9 9 M5 x 0.8 (Not applicable to standard.)
L1 (Non-locking) Manual override A A 20 15 B B 5 48.5 [55] 2 (Pitch) P=10.5 12 2n-One-touch fitting 36.1 29.5 (A, B port) A A 20 15 B B Applicable tube: T0425 5 2 (Pitch) P=10.5 12 2n-M5 X 0.8 (A, B port) Other dimensions are the same as the M5.
A B A B A B A B A B A 2 93.5 126 80 75 66 (35) (59) 4 x M4 mounting hole (40) n 1 2 3 4 5 6 7 8 2 x M5 mounting hole Stations D side U side 2 x G3/4 Conduit port C8: 8 one-touch fitting C8 [3(R) EXH port] DIN rail clamp screw R R 77.7 62.5 12 X 3 12 X 3 45.5 40.5 B B B B B B B B 25 P P 1 1 A A A A A A A A 18.7 7.7 9.5 35 (7.5) (12) C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 one-touch fitting
(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47
Note 3) 5 port base mounted without sub-plate: SYJA540 5-2-23 Series SYJA5000 Dimesions: Body Ported Dimensions: Base Mounted 2 position single: SYJA5140-01 2 position single: SYJA5120-M5(-F) 41.5 (For mounting) 2-4.3 M5 x 0.8 (Pilot port) 1 Manual override 15 5 11 A B A B 1 M5 x 0.8 (Pilot port) 10 24 A B 19 R P 2-2.6 2-3.5 4 37.5 (For mounting) (For manifold mounting) (Bracket) 47 42 Manual
B 2 B B 2 B 2 B 2 BUS IN 56.6 8.7 3/5 E 3/5 E A 4 A 4 A 4 PWR A 4 A 4 (For DIN rail mounting) 11.8 7.5 Note 1) These figures show the SS5Y5-M12SQA-05D.
, 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 45.5 (For M5) 13 8.5 L4 L3 Grommet (G) 5 L5 Manual override M5 x 0.8 [4(A), 2(B) port] (8) 1/8 [1(P), 5(R1), 3(R2) port] (5.5) 16.5 31.5 44.5 31.5 12 23.5 30 Approx. 300 (Lead wire length) 120.4 R1 5 P 1 R2 3 3 R2 1 P 5 R1 16.5 16.5 B B B B B 107.4 53.7 (35) 47 2 2 2 2 2 4 4 4 4 4 A A A A A (DIN rail) 17.3 4 x 4.5 (For mounting) PE port
Bottom Side Top Direction 1/8 1/8 1/8 P, R port M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52
Port size 2-M5 x 0.8 [32: 2-Rc 1/8] 2-P through Seal washer Vacuum port size Socket (Only 16) M5 x 0.8 d Through d Through d through Hexagon width across flats 8 Width across flats L 2-P through HA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 GA A' B C d D E F FK FL FY GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKQ16
Mineral oil A A A C A A 18 Sodium hypochlorite (2%, Room temperature) A C D A D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B D A A B 23 Unless noted otherwise, the solution concentration is in a saturated state.
Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.
switch ZH ZU Vacuum port (V) M5 (or M6) ZL A ZY 18 4 ZF 15.5 ZP 2 x 3.3 (Mounting hole) Bracket A (Standard accessory) SP Filter unit (F) ZX-K3-F Without switch and filter ZX1-K3 ZCUK AMJ 91.2 AMV 11.5 7 1 20 41 1 AEP 51 HEP 8 Bracket B (Standard accessory) ZX1-OBB Related (Mounting hole) 2 x 3.6 Equipment 3.6 (Mounting hole) 2 x R1.8 (Mounting hole) 4.8 10 1 8.8 19 Filter unit A A 35.4
1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.
P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5
needle M5 x 0.8 (Port) 2 x M5 x 0.8 G G 2 x M5 x 0.8 (Hexagon socket head plug) MY3A MY3B (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A MY3M Z + Stroke M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) 2 x 2 x J depth K XX (WW) XX (WW) M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) MY1BG MY1BG VV VV 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) (Hexagon
2 66 8 9 0 1 40 COM PWR 35 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 one-touch fitting DIN rail clamp screw R R 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A 12 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 one-touch fitting
(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17
confirmation switch ZL ZY ZQ ZF 4 18 ZP 15.5 ZCU 2-3.3 Mounting hole Bracket A (Standard accessory) M5 (or M6) (V port) Adsorption nozzle piping port AMJ Misc.
141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings
BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3: